Udrea, F.; Ali, S. Z.; Brezeanu, M.; Dumitru, V.; Buiu, O.; Poenaru, I.; Chowdhury, M. F.; De Luca, A.; Gardner, J. W.
SOI sensing technologies for harsh environment
This paper reviews and addresses certain aspects of Silicon-On-Insulator (SOI) technologies for a harsh environment. The paper first describes the need for specialized sensors in applications such as (i) domestic and other small-scale boilers, (ii) CO2 Capture and Sequestration, (iii) oil & gas storage and transportation, and (iv) automotive. We describe in brief the advantages and special features of SOI technology for sensing applications requiring temperatures in excess of the typical bulk silicon junction temperatures of 150oC. Finally we present the concepts, structures and prototypes of simple and smart micro-hotplate and Infra Red (IR) based emitters for NDIR (Non Dispersive IR) gas sensors in harsh environments. Keywords: Silicon on Insulator (SOI), CMOS technology for sensing applications, System in Package (SiP). humidity (i.e. water vapour) are essential. At the same time, measuring toxic gases such as H2S has become an important issue for avoiding pollution and poisoning and in general for environment safety. Combustion optimization in domestic and other small-scale boilers, CO2 Capture and Sequestration (CCS) and deep-well oil and gas exploration, oil and gas storage and transportation, combustion optimization and emission control in automotive, aerospace, and marine are examples of applications that require sensors operating in various harsh