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US company launches first MEMS‐based IR detector array

US company launches first MEMS‐based IR detector array Describes the world's first uncooled infrared array sensor based on micro electro‐mechanical systems technology. Each pixel comprises a cantilever which bends as it warms up. The system measures the capacitance between each cantilever and a metal substrate. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Sensor Review Emerald Publishing

US company launches first MEMS‐based IR detector array

Robert W. Bogue
Sensor Review , Volume 23 (4): 3 – Dec 1, 2003
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Publisher
Emerald Publishing
Copyright
Copyright © 2003 MCB UP Ltd. All rights reserved.
ISSN
0260-2288
DOI
10.1108/02602280310496809
Publisher site
See Article on Publisher Site

Abstract

Describes the world's first uncooled infrared array sensor based on micro electro‐mechanical systems technology. Each pixel comprises a cantilever which bends as it warms up. The system measures the capacitance between each cantilever and a metal substrate.

Journal

Sensor Review – Emerald Publishing

Published: Dec 1, 2003

Keywords: Image sensors; Infrared devices

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