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Transparent Protective Coating Technique for Amorphous Si Image Sensor

Transparent Protective Coating Technique for Amorphous Si Image Sensor To obtain the best moistureproof and most reliable protective coating for an amorphous silicon image sensor A4 documents, three methods of coating and patterning processes and 15 types of resin classified into five kinds of materials were evaluated. Through this study, a screenprinting method using silicone resin material cured under conditions of 150C for 60 minutes to form a 60 m thick protective coating film was selected because of the simplicity of its fabrication process compared with the other two methods. The aSi photodiodes were tested under conditions of 121C2 atm. for 300 hours, 30C to 100C for 350 cycles and 85C for 500 hours, and their characteristics were not negatively affected. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Microelectronics International Emerald Publishing

Transparent Protective Coating Technique for Amorphous Si Image Sensor

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Publisher
Emerald Publishing
Copyright
Copyright © Emerald Group Publishing Limited
ISSN
1356-5362
DOI
10.1108/eb044453
Publisher site
See Article on Publisher Site

Abstract

To obtain the best moistureproof and most reliable protective coating for an amorphous silicon image sensor A4 documents, three methods of coating and patterning processes and 15 types of resin classified into five kinds of materials were evaluated. Through this study, a screenprinting method using silicone resin material cured under conditions of 150C for 60 minutes to form a 60 m thick protective coating film was selected because of the simplicity of its fabrication process compared with the other two methods. The aSi photodiodes were tested under conditions of 121C2 atm. for 300 hours, 30C to 100C for 350 cycles and 85C for 500 hours, and their characteristics were not negatively affected.

Journal

Microelectronics InternationalEmerald Publishing

Published: Mar 1, 1991

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