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The investigation of basic microfluidic elements in LTCC structures

The investigation of basic microfluidic elements in LTCC structures PurposeThe purpose of this study is to design, fabricate and investigate low-temperature co-fired ceramic (LTCC) structures with integrated microfluidic elements. Special attention is paid to the study of fluid properties of micro-channels and microvalves, which are important constitutive parts of both, microfluidic systems and individual microfluidic devices.Design/methodology/approachSeveral test patterns of fluid channels with different geometry and different types of valves were designed and realized in LTCC technology. All test structures were tested under the flow of two fluids (liquids): water and isopropyl alcohol. Flow rates at different applied pressure were measured and hydrodynamic resistance and diode effect were calculated.FindingsThe investigation of the channels showed that viscosity of fluidic media has significant influence on the hydrodynamic resistance in channels with rectangular cross-section, while this effect is small on channels with square cross-section. The viscosity also has a decisive influence on the diode effect of different shape of valves, and therefore, it is important in the selection of the valve in practical applications.Research limitations/implicationsIn this work, the investigation of hydrodynamic resistance of channels and diode effect of passive valves is limited on selected geometry and only on two fluidic media and two applied pressures. All these and some other parameters have a significant influence on fluidic properties, but this will be the topic of the next research work, which will be supported by numerical modelling.Practical implicationsThe presented results are useful in the future designing process of LTCC-based microfluidic devices and systems.Originality/valueMicrofluidic in the LTCC structures is an unconventional use of this technology. Therefore, the fluid properties are relatively unsearched. On the other hand, the global use of microfluidic devices and systems is growing rapidly in various applications. They are mostly made by polymer materials, however, in more demanding applications; ceramic is a useful alternative. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Microelectronics International Emerald Publishing

The investigation of basic microfluidic elements in LTCC structures

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Publisher
Emerald Publishing
Copyright
Copyright © Emerald Group Publishing Limited
ISSN
1356-5362
DOI
10.1108/MI-12-2017-0072
Publisher site
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Abstract

PurposeThe purpose of this study is to design, fabricate and investigate low-temperature co-fired ceramic (LTCC) structures with integrated microfluidic elements. Special attention is paid to the study of fluid properties of micro-channels and microvalves, which are important constitutive parts of both, microfluidic systems and individual microfluidic devices.Design/methodology/approachSeveral test patterns of fluid channels with different geometry and different types of valves were designed and realized in LTCC technology. All test structures were tested under the flow of two fluids (liquids): water and isopropyl alcohol. Flow rates at different applied pressure were measured and hydrodynamic resistance and diode effect were calculated.FindingsThe investigation of the channels showed that viscosity of fluidic media has significant influence on the hydrodynamic resistance in channels with rectangular cross-section, while this effect is small on channels with square cross-section. The viscosity also has a decisive influence on the diode effect of different shape of valves, and therefore, it is important in the selection of the valve in practical applications.Research limitations/implicationsIn this work, the investigation of hydrodynamic resistance of channels and diode effect of passive valves is limited on selected geometry and only on two fluidic media and two applied pressures. All these and some other parameters have a significant influence on fluidic properties, but this will be the topic of the next research work, which will be supported by numerical modelling.Practical implicationsThe presented results are useful in the future designing process of LTCC-based microfluidic devices and systems.Originality/valueMicrofluidic in the LTCC structures is an unconventional use of this technology. Therefore, the fluid properties are relatively unsearched. On the other hand, the global use of microfluidic devices and systems is growing rapidly in various applications. They are mostly made by polymer materials, however, in more demanding applications; ceramic is a useful alternative.

Journal

Microelectronics International – Emerald Publishing

Published: Jul 2, 2018

References

  • Tehnološki in tržni trendi na področju kemijskih in bio-senzorjev
  • Design and fabrication of an LTCC structure for a microceramic combustor
  • Design of LTCC-based ceramic structure for chemical microreactor
  • The application of thick-film technology in C-MEMS
  • 3D LTCC structure for a large-volume cavity-type chemical microreactor
  • LTCC-based ceramic microsystems with integrated fluidic elements and sensors
  • Fabrication of low-temperature co-fired ceramics micro-fluidic devices using sacrificial carbon layers
  • LTCC fluidic microsystems
  • LTCC microfluidic system
  • Overview of low temperature cofired ceramics tape technology for meso-system technology (MsST)
  • LTCC manifold for heavy metal detection system in biomedical and environmental fluids