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The fast‐moving world of MEMS technology

The fast‐moving world of MEMS technology Purpose – The purpose of this paper is to provide a technical review of silicon micro‐electromechanical systems (MEMS) technology and its applications. Design/methodology/approach – Following an introduction, the paper describes silicon MEMS fabrication and assembly techniques, considers a selection of commercially important products and their applications and concludes with a brief review of power MEMS research. Findings – Silicon MEMS fabrication technology is derived from techniques used in semiconductor manufacture and has yielded a diverse and ever‐growing range of sensors, actuators and other miniaturised devices that find applications in a multitude of industries. Originality/value – This paper provides a detailed technical review of MEMS technology and its applications. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Assembly Automation Emerald Publishing

The fast‐moving world of MEMS technology

Robert Bogue
Assembly Automation , Volume 29 (4): 8 – Sep 25, 2009
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Publisher
Emerald Publishing
Copyright
Copyright © 2009 Emerald Group Publishing Limited. All rights reserved.
ISSN
0144-5154
DOI
10.1108/01445150910987718
Publisher site
See Article on Publisher Site

Abstract

Purpose – The purpose of this paper is to provide a technical review of silicon micro‐electromechanical systems (MEMS) technology and its applications. Design/methodology/approach – Following an introduction, the paper describes silicon MEMS fabrication and assembly techniques, considers a selection of commercially important products and their applications and concludes with a brief review of power MEMS research. Findings – Silicon MEMS fabrication technology is derived from techniques used in semiconductor manufacture and has yielded a diverse and ever‐growing range of sensors, actuators and other miniaturised devices that find applications in a multitude of industries. Originality/value – This paper provides a detailed technical review of MEMS technology and its applications.

Journal

Assembly Automation – Emerald Publishing

Published: Sep 25, 2009

Keywords: MEMS; Electronic engineering; Silicon; Sensors; Actuators

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