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Systematic layout planning: a study on semiconductor wafer fabrication facilities

Systematic layout planning: a study on semiconductor wafer fabrication facilities This paper proposes to use Muther’s systematic layout planning procedure as the infrastructure to solve a fab layout design problem. A multiple objective decision making tool, analytic hierarchy process, is then proposed to evaluate the design alternatives. The proposed procedure is illustrated to be a viable approach for solving a fab layout design problem through a real‐world case study. It features both the simplicity of the design process and the objectivity of the multiple‐criteria evaluation process as opposed to existing solution methodologies. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png International Journal of Operations & Production Management Emerald Publishing

Systematic layout planning: a study on semiconductor wafer fabrication facilities

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References (15)

Publisher
Emerald Publishing
Copyright
Copyright © 2000 MCB UP Ltd. All rights reserved.
ISSN
0144-3577
DOI
10.1108/01443570010348299
Publisher site
See Article on Publisher Site

Abstract

This paper proposes to use Muther’s systematic layout planning procedure as the infrastructure to solve a fab layout design problem. A multiple objective decision making tool, analytic hierarchy process, is then proposed to evaluate the design alternatives. The proposed procedure is illustrated to be a viable approach for solving a fab layout design problem through a real‐world case study. It features both the simplicity of the design process and the objectivity of the multiple‐criteria evaluation process as opposed to existing solution methodologies.

Journal

International Journal of Operations & Production ManagementEmerald Publishing

Published: Nov 1, 2000

Keywords: Layout; Semiconductors; Material handling; Analytical hierarchy process; Decision making

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