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SILICON SENSORS MlCROENGINEERING

SILICON SENSORS MlCROENGINEERING Sensors engineered on silicon chips have tremendous development potential and are attracting considerable attention in the USA and Japan. By contrast British research and development activities in this area have been weak, even compared with the work at other centres in Europe. BNFFulmer has already completed construction of a clean room with a range of processing equipment and, in expanding its Microengineering Centre for contract and joint R&D projects with other companies, the organization is hoping to put the UK in the lead of European work, filling a vital gap between university research and the large microelectronics silicon foundries. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Sensor Review Emerald Publishing

SILICON SENSORS MlCROENGINEERING

Sensor Review , Volume 12 (2): 4 – Feb 1, 1992

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Publisher
Emerald Publishing
Copyright
Copyright © Emerald Group Publishing Limited
ISSN
0260-2288
DOI
10.1108/eb007873
Publisher site
See Article on Publisher Site

Abstract

Sensors engineered on silicon chips have tremendous development potential and are attracting considerable attention in the USA and Japan. By contrast British research and development activities in this area have been weak, even compared with the work at other centres in Europe. BNFFulmer has already completed construction of a clean room with a range of processing equipment and, in expanding its Microengineering Centre for contract and joint R&D projects with other companies, the organization is hoping to put the UK in the lead of European work, filling a vital gap between university research and the large microelectronics silicon foundries.

Journal

Sensor ReviewEmerald Publishing

Published: Feb 1, 1992

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