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References (2)
-
S. Timoshenko, S. Woinowsky-krieger (1959)
THEORY OF PLATES AND SHELLS -
B. Morten, G. Cicco, M. Prudenziati (1992)
Resonant pressure sensor based on piezoelectric properties of ferroelectric thick filmsSensors and Actuators A-physical, 31
- Publisher
- Emerald Publishing
- Copyright
- Copyright © Emerald Group Publishing Limited
- ISSN
- 1356-5362
- DOI
- 10.1108/eb044572
- Publisher site
- See Article on Publisher Site
Abstract
A study has been carried out on the relationship between the composition, poling condition and piezoelectric properties of thick film layers. Pastes based on leadtitanatezirconate PZT powders, with either PbO or a leadaluminasilicate glass frit as binder, were prepared. Microstructure, electrical and mechanical properties were analysed. Processing and poling conditions modify these properties then a wide latitude of opportunities is offered in the choice of ferroelectricpiezoelectric characteristics of the layers used as sensing elements for sensors. A pressure sensor was realised where a circular diaphragm of alumina supports two piezoelectric layers obtained by screen printing and firing a PZTPbObased ferroelectric paste. The design and the performance characteristics are described.
Journal
Microelectronics International – Emerald Publishing
Published: Feb 1, 1992