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PZTbased Thick Films and the Development of a Piezoelectric Pressure Sensor

PZTbased Thick Films and the Development of a Piezoelectric Pressure Sensor A study has been carried out on the relationship between the composition, poling condition and piezoelectric properties of thick film layers. Pastes based on leadtitanatezirconate PZT powders, with either PbO or a leadaluminasilicate glass frit as binder, were prepared. Microstructure, electrical and mechanical properties were analysed. Processing and poling conditions modify these properties then a wide latitude of opportunities is offered in the choice of ferroelectricpiezoelectric characteristics of the layers used as sensing elements for sensors. A pressure sensor was realised where a circular diaphragm of alumina supports two piezoelectric layers obtained by screen printing and firing a PZTPbObased ferroelectric paste. The design and the performance characteristics are described. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Microelectronics International Emerald Publishing

PZTbased Thick Films and the Development of a Piezoelectric Pressure Sensor

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Publisher
Emerald Publishing
Copyright
Copyright © Emerald Group Publishing Limited
ISSN
1356-5362
DOI
10.1108/eb044572
Publisher site
See Article on Publisher Site

Abstract

A study has been carried out on the relationship between the composition, poling condition and piezoelectric properties of thick film layers. Pastes based on leadtitanatezirconate PZT powders, with either PbO or a leadaluminasilicate glass frit as binder, were prepared. Microstructure, electrical and mechanical properties were analysed. Processing and poling conditions modify these properties then a wide latitude of opportunities is offered in the choice of ferroelectricpiezoelectric characteristics of the layers used as sensing elements for sensors. A pressure sensor was realised where a circular diaphragm of alumina supports two piezoelectric layers obtained by screen printing and firing a PZTPbObased ferroelectric paste. The design and the performance characteristics are described.

Journal

Microelectronics InternationalEmerald Publishing

Published: Feb 1, 1992

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