Get 20M+ Full-Text Papers For Less Than $1.50/day. Start a 14-Day Trial for You or Your Team.

Learn More →

Nanometrology: a critical discipline for the twenty‐first century

Nanometrology: a critical discipline for the twenty‐first century Purpose – To illustrate the importance of nanometrology, the discipline of metrology at the nanoscale, and to describe the techniques involved. Design/methodology/approach – This firstly highlights the importance of nanometrology and considers some future applications with particularly demanding metrological requirements. The main techniques used to characterise nanoscale devices are described. Research and the activities of certain national metrology institutes are discussed. Findings – This illustrates that nanometrology is a critical discipline that will underpin the nanotechnology revolution. It shows that a range of techniques exist for characterising nanomaterials and devices, although most are costly and complex. It further shows that nanometrology developments are underway on a global scale. Originality/value – This paper demonstrates the importance of nanometrology and describes in detail the techniques used. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Sensor Review Emerald Publishing

Nanometrology: a critical discipline for the twenty‐first century

Robert Bogue
Sensor Review , Volume 27 (3): 8 – Jul 3, 2007
Download PDF
8 pages

Loading next page...
 
/lp/emerald-publishing/nanometrology-a-critical-discipline-for-the-twenty-first-century-kZDVRg0FNY

References

References for this paper are not available at this time. We will be adding them shortly, thank you for your patience.

Publisher
Emerald Publishing
Copyright
Copyright © 2007 Emerald Group Publishing Limited. All rights reserved.
ISSN
0260-2288
DOI
10.1108/02602280710758110
Publisher site
See Article on Publisher Site

Abstract

Purpose – To illustrate the importance of nanometrology, the discipline of metrology at the nanoscale, and to describe the techniques involved. Design/methodology/approach – This firstly highlights the importance of nanometrology and considers some future applications with particularly demanding metrological requirements. The main techniques used to characterise nanoscale devices are described. Research and the activities of certain national metrology institutes are discussed. Findings – This illustrates that nanometrology is a critical discipline that will underpin the nanotechnology revolution. It shows that a range of techniques exist for characterising nanomaterials and devices, although most are costly and complex. It further shows that nanometrology developments are underway on a global scale. Originality/value – This paper demonstrates the importance of nanometrology and describes in detail the techniques used.

Journal

Sensor Review – Emerald Publishing

Published: Jul 3, 2007

Keywords: Nanotechnology; Measurement; Instruments; Calibration; Standards

There are no references for this article.