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Modelling of vertical electrostatic comb‐drive for scanning micromirrors

Modelling of vertical electrostatic comb‐drive for scanning micromirrors Purpose – The main aim of this paper is to build an equivalent circuit model of a comb drive microactuator, while the phenomenon of generating the electric fringing field at electrode edges is taken into consideration. Design/methodology/approach – The approach to the comb drives design requires the “leakage capacitance” (appearing at electrode edges) to be introduced to the complex equivalent circuit model. Introducing these capacitances leads to defining the circuit model properly. Findings – Such a complex approach by use of the equivalent circuits model could make it possible to reduce the discrepancy between the field and circuit models. These results were obtained after comparing both field and circuit models. Originality/value – MEMS microdrives are in the area which is being developed very dynamically. Improvements in the mathematical models would permit more precise microdrive design, leading to optimal structure. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png COMPEL: The International Journal for Computation and Mathematics in Electrical and Electronic Engineering Emerald Publishing

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Publisher
Emerald Publishing
Copyright
Copyright © 2008 Emerald Group Publishing Limited. All rights reserved.
ISSN
0332-1649
DOI
10.1108/03321640810878180
Publisher site
See Article on Publisher Site

Abstract

Purpose – The main aim of this paper is to build an equivalent circuit model of a comb drive microactuator, while the phenomenon of generating the electric fringing field at electrode edges is taken into consideration. Design/methodology/approach – The approach to the comb drives design requires the “leakage capacitance” (appearing at electrode edges) to be introduced to the complex equivalent circuit model. Introducing these capacitances leads to defining the circuit model properly. Findings – Such a complex approach by use of the equivalent circuits model could make it possible to reduce the discrepancy between the field and circuit models. These results were obtained after comparing both field and circuit models. Originality/value – MEMS microdrives are in the area which is being developed very dynamically. Improvements in the mathematical models would permit more precise microdrive design, leading to optimal structure.

Journal

COMPEL: The International Journal for Computation and Mathematics in Electrical and Electronic EngineeringEmerald Publishing

Published: Jul 11, 2008

Keywords: MEMS; Optical receivers; Switchgear

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