In this work an original humidity sensor is described. It is based on the study of Seebeck voltage evolution during the water evaporation of a micro‐module Peltier (MMP). The measurement principle is to detect (after cooling) the small temperature decrease created when total water evaporation occurs over the MMP. All the active thin layers of the sensor are made from (Bi 2 Te 3 ) 0.9 (Bi 2 Se 3 ) 0.1 (N) films and (Bi 2 Te 3 ) 0.25 (Sb 2 Te 3 ) 0.75 (P) films flash evaporated. Experimental measures were performed in a climatic chamber for several values of relative humidity (50 to 90 per cent). The phenomenon (evaporation) appears after a delay time ।. This delay time is the response time of the sensor. Therefore it is possible to draw the evaporation delay time as a function of relative humidity.
Sensor Review – Emerald Publishing
Published: Dec 1, 2000
Keywords: Humidity; Sensors; Thin film
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