Micro‐module Peltier elaborated by flash technique and used as a humidity sensor

Micro‐module Peltier elaborated by flash technique and used as a humidity sensor In this work an original humidity sensor is described. It is based on the study of Seebeck voltage evolution during the water evaporation of a micro‐module Peltier (MMP). The measurement principle is to detect (after cooling) the small temperature decrease created when total water evaporation occurs over the MMP. All the active thin layers of the sensor are made from (Bi 2 Te 3 ) 0.9 (Bi 2 Se 3 ) 0.1 (N) films and (Bi 2 Te 3 ) 0.25 (Sb 2 Te 3 ) 0.75 (P) films flash evaporated. Experimental measures were performed in a climatic chamber for several values of relative humidity (50 to 90 per cent). The phenomenon (evaporation) appears after a delay time ।. This delay time is the response time of the sensor. Therefore it is possible to draw the evaporation delay time as a function of relative humidity. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Sensor Review Emerald Publishing

Micro‐module Peltier elaborated by flash technique and used as a humidity sensor

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Publisher
Emerald Publishing
Copyright
Copyright © 2000 MCB UP Ltd. All rights reserved.
ISSN
0260-2288
DOI
10.1108/02602280010351046
Publisher site
See Article on Publisher Site

Abstract

In this work an original humidity sensor is described. It is based on the study of Seebeck voltage evolution during the water evaporation of a micro‐module Peltier (MMP). The measurement principle is to detect (after cooling) the small temperature decrease created when total water evaporation occurs over the MMP. All the active thin layers of the sensor are made from (Bi 2 Te 3 ) 0.9 (Bi 2 Se 3 ) 0.1 (N) films and (Bi 2 Te 3 ) 0.25 (Sb 2 Te 3 ) 0.75 (P) films flash evaporated. Experimental measures were performed in a climatic chamber for several values of relative humidity (50 to 90 per cent). The phenomenon (evaporation) appears after a delay time ।. This delay time is the response time of the sensor. Therefore it is possible to draw the evaporation delay time as a function of relative humidity.

Journal

Sensor ReviewEmerald Publishing

Published: Dec 1, 2000

Keywords: Humidity; Sensors; Thin film

References

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