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Simple and accurate high frequency modelling approach of onchip interconnects on a lossy silicon substrate, that considers conductor and substrate skin effects, is presented. The closedform formulas for the frequencydependent series impedance parameters are obtained using a closedform integration method and the vector magnetic potential equation. The proposed frequencydependent inductance Lf and resistance Rf per unit length formulas are shown to be in good agreement with the electromagnetic solutions.
Microelectronics International – Emerald Publishing
Published: Apr 1, 2004
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