Get 20M+ Full-Text Papers For Less Than $1.50/day. Start a 14-Day Trial for You or Your Team.

Learn More →

Hardness Measurements in a SEM as a Quality Test for Thin Films

Hardness Measurements in a SEM as a Quality Test for Thin Films Hardness testing using a SEM offers visual observation and measurement according to the hardness definition even for submicroscopic impressions. It can provide information on plasticity, homogeneity, adhesion etc. which cannot be obtained from depth measurements alone. The device described operates inside a SEM and offers a load between 102N and 105N. The influence of test load, rate of load increase and dwell time on the results was examined on various materials. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Microelectronics International Emerald Publishing

Hardness Measurements in a SEM as a Quality Test for Thin Films

Download PDF
3 pages

Loading next page...
 
/lp/emerald-publishing/hardness-measurements-in-a-sem-as-a-quality-test-for-thin-films-wuT9sYaleK
Publisher
Emerald Publishing
Copyright
Copyright © Emerald Group Publishing Limited
ISSN
1356-5362
DOI
10.1108/eb044241
Publisher site
See Article on Publisher Site

Abstract

Hardness testing using a SEM offers visual observation and measurement according to the hardness definition even for submicroscopic impressions. It can provide information on plasticity, homogeneity, adhesion etc. which cannot be obtained from depth measurements alone. The device described operates inside a SEM and offers a load between 102N and 105N. The influence of test load, rate of load increase and dwell time on the results was examined on various materials.

Journal

Microelectronics International – Emerald Publishing

Published: Mar 1, 1986

There are no references for this article.