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Hardness Measurements in a SEM as a Quality Test for Thin Films

Hardness Measurements in a SEM as a Quality Test for Thin Films Hardness testing using a SEM offers visual observation and measurement according to the hardness definition even for submicroscopic impressions. It can provide information on plasticity, homogeneity, adhesion etc. which cannot be obtained from depth measurements alone. The device described operates inside a SEM and offers a load between 102N and 105N. The influence of test load, rate of load increase and dwell time on the results was examined on various materials. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Microelectronics International Emerald Publishing

Hardness Measurements in a SEM as a Quality Test for Thin Films

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Publisher
Emerald Publishing
Copyright
Copyright © Emerald Group Publishing Limited
ISSN
1356-5362
DOI
10.1108/eb044241
Publisher site
See Article on Publisher Site

Abstract

Hardness testing using a SEM offers visual observation and measurement according to the hardness definition even for submicroscopic impressions. It can provide information on plasticity, homogeneity, adhesion etc. which cannot be obtained from depth measurements alone. The device described operates inside a SEM and offers a load between 102N and 105N. The influence of test load, rate of load increase and dwell time on the results was examined on various materials.

Journal

Microelectronics InternationalEmerald Publishing

Published: Mar 1, 1986

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