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Fabrication technology for microengineering

Fabrication technology for microengineering Reviews some of the more important technologies used for fabricating microcomponents and systems – bulk silicon micromachining, surface micromachining and LIGA, a process for forming deep microstructures by lithography, electroforming and moulding. Discusses the relative merits of using synchroton, electron beam and excimer laser irradiation. Gives a comb actuator and an electrostatic motor as examples of micromachined components. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Sensor Review Emerald Publishing

Fabrication technology for microengineering

Sensor Review , Volume 16 (2): 7 – Jun 1, 1996

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Publisher
Emerald Publishing
Copyright
Copyright © 1996 MCB UP Ltd. All rights reserved.
ISSN
0260-2288
DOI
10.1108/02602289610115566
Publisher site
See Article on Publisher Site

Abstract

Reviews some of the more important technologies used for fabricating microcomponents and systems – bulk silicon micromachining, surface micromachining and LIGA, a process for forming deep microstructures by lithography, electroforming and moulding. Discusses the relative merits of using synchroton, electron beam and excimer laser irradiation. Gives a comb actuator and an electrostatic motor as examples of micromachined components.

Journal

Sensor ReviewEmerald Publishing

Published: Jun 1, 1996

Keywords: Fabrication; Microengineering

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