Experimental and numerical analyses of thickfilm piezoceramic structures for miniaturised sensors and actuators

Experimental and numerical analyses of thickfilm piezoceramic structures for miniaturised sensors... Purpose The successful use of piezoceramic thick films in sensors and actuators requires a thorough understanding of their electrical and electromechanical characteristics. Since these characteristics depend not only on the material's composition but also on its compatibility with various substrates and a number of processing parameters, accurate measurements of the material's parameters are essential. Here, the aim of this paper is to present a procedure for characterising leadzirconatetitanate PZT thick films on prefired lowtemperature cofired ceramic LTCC substrates performed in order to determine the material parameters for numerical modelling.Designmethodologyapproach Owing to the lack of standard procedures for measuring the elastic and piezoelectric properties of the films, the compliance parameters were evaluated from the results of nanoindentation tests, and a substrateflexure method was used to evaluate the transverse piezoelectric coefficients.Findings The validation of the material model and the finiteelement FE analysis of the demonstrator sensoractuator structures are shown to be in agreement with the FE model, even if not an exact fit.Originalityvalue This paper focuses on a characterisation of PZT thick films screenprinted on prefired LTCC substrates. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Microelectronics International Emerald Publishing

Experimental and numerical analyses of thickfilm piezoceramic structures for miniaturised sensors and actuators

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Publisher
Emerald Publishing
Copyright
Copyright © Emerald Group Publishing Limited
ISSN
1356-5362
DOI
10.1108/13565360810875985
Publisher site
See Article on Publisher Site

Abstract

Purpose The successful use of piezoceramic thick films in sensors and actuators requires a thorough understanding of their electrical and electromechanical characteristics. Since these characteristics depend not only on the material's composition but also on its compatibility with various substrates and a number of processing parameters, accurate measurements of the material's parameters are essential. Here, the aim of this paper is to present a procedure for characterising leadzirconatetitanate PZT thick films on prefired lowtemperature cofired ceramic LTCC substrates performed in order to determine the material parameters for numerical modelling.Designmethodologyapproach Owing to the lack of standard procedures for measuring the elastic and piezoelectric properties of the films, the compliance parameters were evaluated from the results of nanoindentation tests, and a substrateflexure method was used to evaluate the transverse piezoelectric coefficients.Findings The validation of the material model and the finiteelement FE analysis of the demonstrator sensoractuator structures are shown to be in agreement with the FE model, even if not an exact fit.Originalityvalue This paper focuses on a characterisation of PZT thick films screenprinted on prefired LTCC substrates.

Journal

Microelectronics InternationalEmerald Publishing

Published: Apr 18, 2008

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