An integrated sensor with three elements zinc oxide, tin oxide and tungsten oxide was fabricated by thick film techniques in order to develop a smell sensor. Using this sensor and pattern recognition method, the possibility of identifying 15 chemical compounds which belong to the alcohol, ester, ketone, benzene and hydrocarbon group was examined. The following results were obtained All 15 compounds have different patterns, so they can be individually identified compounds which have the same functional groups have similar patterns and, when gas sensitivity of three elements is displayed in a threedimensional space, the compounds with the same functional group form a specific closed space. This indicates that the sensor can identify functional groups of chemical compounds.
Microelectronics International – Emerald Publishing
Published: Feb 1, 1988
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