Development of a microcontroller‐based humidity sensing system

Development of a microcontroller‐based humidity sensing system This paper documents the development of a microcontroller‐based humidity sensing system. The humidity sensors are manufactured by thin film technology from a novel combination of SiO/In 2 O 3 . The fabrication and characterization of the sensor samples is presented and discussed in this paper. The sensor pattern consists of an interdigitated conductor on top of which the sensing layer is deposited. A humidity sensitivity of 0.25%/RH% and a thermal sensitivity of 0.103%/°C has been measured. The samples exhibit a low drift over a one‐year time span (0.0013RH%/yr), low hysteresis (0.34RH%), good linearity (±2RH%) and a reasonably fast time response (18 sec). The entire sensor system has been analyzed mathematically and the necessary algorithms for error‐compensation have been developed. The resulting measurement system is efficient, accurate and flexible. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Sensor Review Emerald Publishing

Development of a microcontroller‐based humidity sensing system

Sensor Review, Volume 22 (2): 7 – Jun 1, 2002

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Publisher
Emerald Publishing
Copyright
Copyright © 2002 MCB UP Ltd. All rights reserved.
ISSN
0260-2288
DOI
10.1108/02602280210421262
Publisher site
See Article on Publisher Site

Abstract

This paper documents the development of a microcontroller‐based humidity sensing system. The humidity sensors are manufactured by thin film technology from a novel combination of SiO/In 2 O 3 . The fabrication and characterization of the sensor samples is presented and discussed in this paper. The sensor pattern consists of an interdigitated conductor on top of which the sensing layer is deposited. A humidity sensitivity of 0.25%/RH% and a thermal sensitivity of 0.103%/°C has been measured. The samples exhibit a low drift over a one‐year time span (0.0013RH%/yr), low hysteresis (0.34RH%), good linearity (±2RH%) and a reasonably fast time response (18 sec). The entire sensor system has been analyzed mathematically and the necessary algorithms for error‐compensation have been developed. The resulting measurement system is efficient, accurate and flexible.

Journal

Sensor ReviewEmerald Publishing

Published: Jun 1, 2002

Keywords: Humidity; Sensors; Thin film

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