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Design and vibration analysis of a self-adaptive piston in a novel nanoimprint system

Design and vibration analysis of a self-adaptive piston in a novel nanoimprint system PurposeA self-adaptive piston is designed for the compressional gas cushion press nanoimprint lithography system. It avoids the lube pollution and high wear of traditional piston.Design/methodology/approachThe self-adaptive piston device consists of symmetrical piston bodies, piston rings and other parts. The two piston bodies are linked by a ball-screw. The locking nut adjusts the distance between two piston bodies to avoid the piston rings from being stuck. The piston rings are placed between two piston bodies.FindingsThe simulation results based on COMSOL indicate that cylinder vibration caused by self-adaptive piston is 15.9 times smaller than the one caused by a traditional piston.Originality/valueThe self-adaptive piston is superior to the traditional piston in decreasing cylinder vibration. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Industrial Lubrication and Tribology Emerald Publishing

Design and vibration analysis of a self-adaptive piston in a novel nanoimprint system

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Publisher
Emerald Publishing
Copyright
Copyright © Emerald Group Publishing Limited
ISSN
0036-8792
DOI
10.1108/ILT-02-2016-0033
Publisher site
See Article on Publisher Site

Abstract

PurposeA self-adaptive piston is designed for the compressional gas cushion press nanoimprint lithography system. It avoids the lube pollution and high wear of traditional piston.Design/methodology/approachThe self-adaptive piston device consists of symmetrical piston bodies, piston rings and other parts. The two piston bodies are linked by a ball-screw. The locking nut adjusts the distance between two piston bodies to avoid the piston rings from being stuck. The piston rings are placed between two piston bodies.FindingsThe simulation results based on COMSOL indicate that cylinder vibration caused by self-adaptive piston is 15.9 times smaller than the one caused by a traditional piston.Originality/valueThe self-adaptive piston is superior to the traditional piston in decreasing cylinder vibration.

Journal

Industrial Lubrication and TribologyEmerald Publishing

Published: Jul 10, 2017

References