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- Publisher
- Emerald Publishing
- Copyright
- Copyright © 2004 Emerald Group Publishing Limited. All rights reserved.
- ISSN
- 0332-1649
- DOI
- 10.1108/03321640410553300
- Publisher site
- See Article on Publisher Site
Abstract
This paper deals with the coupled mechanical‐electrostatic analysis of a shunt capacitive MEMS switch. The mechanical and electrostatic parts of the problem are modelled by the FE and BE methods, respectively. The fast multipole method is applied to reduce the storage requirements and the computational cost of the BE electrostatic model. An adaptive truncation expansion of the 3D Laplace Green function is employed. The strong interaction between the mechanical and electrostatic systems is considered iteratively.
Journal
COMPEL: The International Journal for Computation and Mathematics in Electrical and Electronic Engineering – Emerald Publishing
Published: Dec 1, 2004
Keywords: Finite element analysis; Boundary‐elements methods