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Comparison of Relative Risk before and after SEMI S2‐93A Implementation: Using a Semiconductor Plant in a Taiwan’s Science Park as an Example

Comparison of Relative Risk before and after SEMI S2‐93A Implementation: Using a Semiconductor... The objective of this study is to evaluate the equipment risk before and after SEMI S2‐93A implementation, thus providing a guideline for safety improvement. Semiconductor Plant A located in Taiwan’s Hsinchu Science Based Industrial Park with 147 manufacturing machines was used for risk assessment. The study was carried out in three steps. First, a preliminary hazard analysis was conducted. A detailed process safety evaluation was conducted (Hazard and Operability Study, HAZOP); and finally, the equipment risk comparison before and after Semiconductor Equipment Manufacturing Instruction (SEMI S2‐93A) implementation. The preliminary hazard analysis results showed high risk in 21.77 per cent of the manufacturing machines under risk assessment at Plant A. The largest percentage existed in the Diffusion Department. The machine types specified by the hazardous work site review and inspection according to Article 26 of Labor Inspection Regulation (the machines that use such chemicals as, SiHi, HF, HCL, etc. and that are determined to be highly hazardous through preliminary hazard analysis) were added to the detailed process analysis and evaluation. In the third part of this evaluation, the machines at Plant A used for detailed process safety assessment were divided into two groups based on the manufacturing data before and after 1993. The severity, possibility, and actual accident analysis before and after SEMI S2‐93A implementation were compared. The semiconductor Equipment Manufacturing Instruction (SEMI S2‐93A) implementation can reduce the severity and possibility of hazard occurrence. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Asian Journal on Quality Emerald Publishing

Comparison of Relative Risk before and after SEMI S2‐93A Implementation: Using a Semiconductor Plant in a Taiwan’s Science Park as an Example

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Publisher
Emerald Publishing
Copyright
Copyright © 2005 Emerald Group Publishing Limited. All rights reserved.
ISSN
1598-2688
DOI
10.1108/15982688200500006
Publisher site
See Article on Publisher Site

Abstract

The objective of this study is to evaluate the equipment risk before and after SEMI S2‐93A implementation, thus providing a guideline for safety improvement. Semiconductor Plant A located in Taiwan’s Hsinchu Science Based Industrial Park with 147 manufacturing machines was used for risk assessment. The study was carried out in three steps. First, a preliminary hazard analysis was conducted. A detailed process safety evaluation was conducted (Hazard and Operability Study, HAZOP); and finally, the equipment risk comparison before and after Semiconductor Equipment Manufacturing Instruction (SEMI S2‐93A) implementation. The preliminary hazard analysis results showed high risk in 21.77 per cent of the manufacturing machines under risk assessment at Plant A. The largest percentage existed in the Diffusion Department. The machine types specified by the hazardous work site review and inspection according to Article 26 of Labor Inspection Regulation (the machines that use such chemicals as, SiHi, HF, HCL, etc. and that are determined to be highly hazardous through preliminary hazard analysis) were added to the detailed process analysis and evaluation. In the third part of this evaluation, the machines at Plant A used for detailed process safety assessment were divided into two groups based on the manufacturing data before and after 1993. The severity, possibility, and actual accident analysis before and after SEMI S2‐93A implementation were compared. The semiconductor Equipment Manufacturing Instruction (SEMI S2‐93A) implementation can reduce the severity and possibility of hazard occurrence.

Journal

Asian Journal on QualityEmerald Publishing

Published: Apr 17, 2005

Keywords: Semiconductor; Risk; HAZOP; SEMI S2‐93A

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