A polyimide based resistive humidity sensor

A polyimide based resistive humidity sensor Purpose – To establish an accurate and sensitive method to characterize the moisture content of a particular environment. Design/methodology/approach – This paper proposes a relatively simple humidity sensor design consisting of electrodes on a suitable substrate coated with a polyimide material. The changes in relative humidity are denoted by a corresponding change in the polyimide material's electrical resistance profile. The design proposed in this work can be microfabricated and integrated with electronic circuitry. This sensor can be fabricated on alumina or silicon substrates. The electrode material can be made up of nickel, gold or aluminum and the thickness of the electrodes ranges typically between 0.2 and 0.3 μ m. The sensor consists of an active sensing layer on top of a set of electrodes. The design of the electrodes can be configured for both resistive and capacitive sensing. Findings – The polyimide material's ohmic resistance changes significantly with humidity variations. Changes in resistance as large as 4‐6 orders of magnitude are attainable over the entire operational humidity range. Research limitations/implications – As the sensitivity varies non‐linearly with the humidity, the measurement has to be carried out over a very wide range in order to calibrate the sensor. The sensitivity and output range of the sensor can be easily controlled by changing the electrode spacing or geometry. Practical implications – The control of humidity is important in many applications ranging from bio‐medical to space exploration. Originality/value – A simple, easy to fabricate and measure, and low cost resistive‐type humidity sensor was developed. The realized sensor is suitable for integrating with microfabrication. Hence, multiple sensors of varying sensitivities and output ranges could be integrated on the same chip. Over the last few years, newly emerging micro‐electro‐mechanical‐systems technology and micro‐fabrication techniques have gained popularity and importance in the miniaturization of a variety of sensors and actuators. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Sensor Review Emerald Publishing

A polyimide based resistive humidity sensor

Loading next page...
 
/lp/emerald-publishing/a-polyimide-based-resistive-humidity-sensor-M6UEocMawZ
Publisher
Emerald Publishing
Copyright
Copyright © 2005 Emerald Group Publishing Limited. All rights reserved.
ISSN
0260-2288
DOI
10.1108/02602280510620123
Publisher site
See Article on Publisher Site

Abstract

Purpose – To establish an accurate and sensitive method to characterize the moisture content of a particular environment. Design/methodology/approach – This paper proposes a relatively simple humidity sensor design consisting of electrodes on a suitable substrate coated with a polyimide material. The changes in relative humidity are denoted by a corresponding change in the polyimide material's electrical resistance profile. The design proposed in this work can be microfabricated and integrated with electronic circuitry. This sensor can be fabricated on alumina or silicon substrates. The electrode material can be made up of nickel, gold or aluminum and the thickness of the electrodes ranges typically between 0.2 and 0.3 μ m. The sensor consists of an active sensing layer on top of a set of electrodes. The design of the electrodes can be configured for both resistive and capacitive sensing. Findings – The polyimide material's ohmic resistance changes significantly with humidity variations. Changes in resistance as large as 4‐6 orders of magnitude are attainable over the entire operational humidity range. Research limitations/implications – As the sensitivity varies non‐linearly with the humidity, the measurement has to be carried out over a very wide range in order to calibrate the sensor. The sensitivity and output range of the sensor can be easily controlled by changing the electrode spacing or geometry. Practical implications – The control of humidity is important in many applications ranging from bio‐medical to space exploration. Originality/value – A simple, easy to fabricate and measure, and low cost resistive‐type humidity sensor was developed. The realized sensor is suitable for integrating with microfabrication. Hence, multiple sensors of varying sensitivities and output ranges could be integrated on the same chip. Over the last few years, newly emerging micro‐electro‐mechanical‐systems technology and micro‐fabrication techniques have gained popularity and importance in the miniaturization of a variety of sensors and actuators.

Journal

Sensor ReviewEmerald Publishing

Published: Dec 1, 2005

Keywords: Sensors; Polymers; Humidity

References

You’re reading a free preview. Subscribe to read the entire article.


DeepDyve is your
personal research library

It’s your single place to instantly
discover and read the research
that matters to you.

Enjoy affordable access to
over 18 million articles from more than
15,000 peer-reviewed journals.

All for just $49/month

Explore the DeepDyve Library

Search

Query the DeepDyve database, plus search all of PubMed and Google Scholar seamlessly

Organize

Save any article or search result from DeepDyve, PubMed, and Google Scholar... all in one place.

Access

Get unlimited, online access to over 18 million full-text articles from more than 15,000 scientific journals.

Your journals are on DeepDyve

Read from thousands of the leading scholarly journals from SpringerNature, Wiley-Blackwell, Oxford University Press and more.

All the latest content is available, no embargo periods.

See the journals in your area

DeepDyve

Freelancer

DeepDyve

Pro

Price

FREE

$49/month
$360/year

Save searches from
Google Scholar,
PubMed

Create folders to
organize your research

Export folders, citations

Read DeepDyve articles

Abstract access only

Unlimited access to over
18 million full-text articles

Print

20 pages / month