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A novel PVDF microforce/force rate sensor for practical applications in micromanipulation

A novel PVDF microforce/force rate sensor for practical applications in micromanipulation This paper presents our development of a novel force and force rate sensory system to advance applications in micromanipulation using an in situ polyvinylidene fluoride (PVDF) piezoelectric sensor. To allow close monitoring of magnitude and direction of microforces acting on microdevices during manipulation, PVDF ploymer films are used to fabricate highly sensitive 1D and 2D sensors to detect real‐time microforce and force rate information during the manipulation process. The sensory system with a resolution in the range of sub‐micronewtons can be applied effectively to develop a technology on the force‐reflection microassembly of surface MEMS structures. In addition, a tele‐micromanipulation platform, which can be used to perform tele‐microassembly of the MEMS structures and tele‐cell‐manipulation with force/haptic feedback via Internet was also built successfully. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Sensor Review Emerald Publishing

A novel PVDF microforce/force rate sensor for practical applications in micromanipulation

Sensor Review , Volume 24 (3): 10 – Sep 1, 2004

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Publisher
Emerald Publishing
Copyright
Copyright © 2004 Emerald Group Publishing Limited. All rights reserved.
ISSN
0260-2288
DOI
10.1108/02602280410545407
Publisher site
See Article on Publisher Site

Abstract

This paper presents our development of a novel force and force rate sensory system to advance applications in micromanipulation using an in situ polyvinylidene fluoride (PVDF) piezoelectric sensor. To allow close monitoring of magnitude and direction of microforces acting on microdevices during manipulation, PVDF ploymer films are used to fabricate highly sensitive 1D and 2D sensors to detect real‐time microforce and force rate information during the manipulation process. The sensory system with a resolution in the range of sub‐micronewtons can be applied effectively to develop a technology on the force‐reflection microassembly of surface MEMS structures. In addition, a tele‐micromanipulation platform, which can be used to perform tele‐microassembly of the MEMS structures and tele‐cell‐manipulation with force/haptic feedback via Internet was also built successfully.

Journal

Sensor ReviewEmerald Publishing

Published: Sep 1, 2004

Keywords: Microsensors; Assembly; Force

References