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A Large Format Modified TEA CO2 Laser Based Process for Costeffective Small Via Generation

A Large Format Modified TEA CO2 Laser Based Process for Costeffective Small Via Generation Recently, a Transverse Excited Atmospheric TEA CO2 laser technology has been developed for the micromachining of vias in nonreinforced glass laminates. This system has been designed to accommodate the large panel sizes associated with PWB processing. The salient features of this modified CO2 laser technology are summarised. A joint LumonicsMotorola study was carried out to assess the applicability of this laser processing technology for use in higher density PWB and MCML substrate processing and its compatibility with currently available classes of dielectrics used in high density interconnect applications. A 10x improvement in cycle timethroughput over the existing raster scanning laser ablation process has been demonstrated. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Circuit World Emerald Publishing

A Large Format Modified TEA CO2 Laser Based Process for Costeffective Small Via Generation

Circuit World , Volume 21 (1): 4 – Apr 1, 1994

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Publisher
Emerald Publishing
Copyright
Copyright © Emerald Group Publishing Limited
ISSN
0305-6120
DOI
10.1108/eb046285
Publisher site
See Article on Publisher Site

Abstract

Recently, a Transverse Excited Atmospheric TEA CO2 laser technology has been developed for the micromachining of vias in nonreinforced glass laminates. This system has been designed to accommodate the large panel sizes associated with PWB processing. The salient features of this modified CO2 laser technology are summarised. A joint LumonicsMotorola study was carried out to assess the applicability of this laser processing technology for use in higher density PWB and MCML substrate processing and its compatibility with currently available classes of dielectrics used in high density interconnect applications. A 10x improvement in cycle timethroughput over the existing raster scanning laser ablation process has been demonstrated.

Journal

Circuit WorldEmerald Publishing

Published: Apr 1, 1994

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