Tribological properties of SiC-based MCD films synthesized using different carbon sources when sliding against Si3N4

Tribological properties of SiC-based MCD films synthesized using different carbon sources when... Article history: Micro-crystalline diamond (MCD) films are deposited on reactive sintering SiC substrates by the bias Received 16 December 2015 enhanced hot filament chemical vapor deposition (BE-HFCVD) method, respectively using the methane, Received in revised form 23 January 2016 acetone, methanol and ethanol as the carbon source. Two sets of standard tribotests are conducted, Accepted 27 January 2016 adopting Si N balls as the counterpart balls, respectively with the purpose of clarifying differences 3 4 Available online 8 February 2016 among tribological properties of different MCD films, and studying detailed effects of the carbon source C, normal load F and sliding velocity v based on orthogonal analyses. It is clarified that the methane- Keywords: MCD film presents the lowest growth rate, the highest film quality, the highest hardness and the best Diamond film adhesion, in consequence, it also performs the best tribological properties, including the lowest coefficient Carbon source of friction (COF) and wear rate I , while the opposite is the methanol-MCD film. Under a normal load F d n Tribological property of 7 N and at a sliding velocity v of 0.4183 m/s, for the methane-MCD film, the maximum COF (MCOF) Normal load Sliding velocity is 0.524, http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Applied Surface Science Elsevier

Tribological properties of SiC-based MCD films synthesized using different carbon sources when sliding against Si3N4

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Publisher
Elsevier
Copyright
Copyright © 2016 Elsevier B.V.
ISSN
0169-4332
eISSN
1873-5584
D.O.I.
10.1016/j.apsusc.2016.01.249
Publisher site
See Article on Publisher Site

Abstract

Article history: Micro-crystalline diamond (MCD) films are deposited on reactive sintering SiC substrates by the bias Received 16 December 2015 enhanced hot filament chemical vapor deposition (BE-HFCVD) method, respectively using the methane, Received in revised form 23 January 2016 acetone, methanol and ethanol as the carbon source. Two sets of standard tribotests are conducted, Accepted 27 January 2016 adopting Si N balls as the counterpart balls, respectively with the purpose of clarifying differences 3 4 Available online 8 February 2016 among tribological properties of different MCD films, and studying detailed effects of the carbon source C, normal load F and sliding velocity v based on orthogonal analyses. It is clarified that the methane- Keywords: MCD film presents the lowest growth rate, the highest film quality, the highest hardness and the best Diamond film adhesion, in consequence, it also performs the best tribological properties, including the lowest coefficient Carbon source of friction (COF) and wear rate I , while the opposite is the methanol-MCD film. Under a normal load F d n Tribological property of 7 N and at a sliding velocity v of 0.4183 m/s, for the methane-MCD film, the maximum COF (MCOF) Normal load Sliding velocity is 0.524,

Journal

Applied Surface ScienceElsevier

Published: Apr 30, 2016

References

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