Article history: Micro-crystalline diamond (MCD) ﬁlms are deposited on reactive sintering SiC substrates by the bias Received 16 December 2015 enhanced hot ﬁlament chemical vapor deposition (BE-HFCVD) method, respectively using the methane, Received in revised form 23 January 2016 acetone, methanol and ethanol as the carbon source. Two sets of standard tribotests are conducted, Accepted 27 January 2016 adopting Si N balls as the counterpart balls, respectively with the purpose of clarifying differences 3 4 Available online 8 February 2016 among tribological properties of different MCD ﬁlms, and studying detailed effects of the carbon source C, normal load F and sliding velocity v based on orthogonal analyses. It is clariﬁed that the methane- Keywords: MCD ﬁlm presents the lowest growth rate, the highest ﬁlm quality, the highest hardness and the best Diamond ﬁlm adhesion, in consequence, it also performs the best tribological properties, including the lowest coefﬁcient Carbon source of friction (COF) and wear rate I , while the opposite is the methanol-MCD ﬁlm. Under a normal load F d n Tribological property of 7 N and at a sliding velocity v of 0.4183 m/s, for the methane-MCD ﬁlm, the maximum COF (MCOF) Normal load Sliding velocity is 0.524,
Applied Surface Science – Elsevier
Published: Apr 30, 2016
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