Article history: Detailed microstructural studies were performed on Ni/Si ohmic contacts to silicon carbide in order to Received 21 December 2015 investigate the effect of initial Ni:Si ratio in as-deposited structures on the occurrence of characteristic Accepted 9 February 2016 defects in Ni silicide layers, such as voids, layer discontinuities, rough surface or rough interface. The Available online 11 February 2016 chosen range of investigated Ni:Si ratios corresponded to -Ni Si as a dominant phase after complete annealing sequence. Strong effect of the initial stoichiometry on the ohmic contact’s microstructure was Keywords: observed. The highest Ni concentration signiﬁcantly lowered the temperature at which roughening of Ohmic contact the surface and the interface occurred. The middle value of investigated concentrations resulted in the Silicon carbide rough interface after high temperature annealing, while the lowest investigated Ni content preserved Nickel silicides smooth interface but introduced large voids and layer discontinuities. After the ﬁrst annealing step, - Microstructure Ni Si and/or -Ni Si phases were detected. In the ohmic contacts (after two-step annealing sequence), 31 12 2 beside -Ni Si, the metastable, high temperature phase -Ni Si was detected (also referred to as Ni Si ·h). 2 2 3 2 This phase
Applied Surface Science – Elsevier
Published: Apr 30, 2016
It’s your single place to instantly
discover and read the research
that matters to you.
Enjoy affordable access to
over 18 million articles from more than
15,000 peer-reviewed journals.
All for just $49/month
Query the DeepDyve database, plus search all of PubMed and Google Scholar seamlessly
Save any article or search result from DeepDyve, PubMed, and Google Scholar... all in one place.
Get unlimited, online access to over 18 million full-text articles from more than 15,000 scientific journals.
Read from thousands of the leading scholarly journals from SpringerNature, Elsevier, Wiley-Blackwell, Oxford University Press and more.
All the latest content is available, no embargo periods.
“Hi guys, I cannot tell you how much I love this resource. Incredible. I really believe you've hit the nail on the head with this site in regards to solving the research-purchase issue.”Daniel C.
“Whoa! It’s like Spotify but for academic articles.”@Phil_Robichaud
“I must say, @deepdyve is a fabulous solution to the independent researcher's problem of #access to #information.”@deepthiw
“My last article couldn't be possible without the platform @deepdyve that makes journal papers cheaper.”@JoseServera