The aim of this paper is to fabrication of quasi-greyscale microstructures by curved surface soft magnetic mold. In this paper, a photocuring system is first developed and built independently, then created the magnetic curved surface microstructure soft mold, the magnetic force of the magnetic curved surface via to different heights was obtained after tested and recorded. The experimental results show that, under different surface curvatures and voltage control conditions, will have different quasi-grey scale array microstructures. In addition, this paper conducts research on the imprinting and replica molding of photoresist composite magnetic powder in order to discuss the formability of magnetic photoresist, and finally, the experimental result is combined with the simulation to obtain more accurate prediction and results.
Microelectronic Engineering – Elsevier
Published: May 5, 2018
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