Structural and gas sensing properties of ex-situ oxidized Sn grown by thermal evaporation

Structural and gas sensing properties of ex-situ oxidized Sn grown by thermal evaporation Article history: SnO thin films were obtained by ex-situ oxidation of Sn metal film deposited by thermal evaporation. Received 19 July 2015 The oxidation of the Sn film was carried out at 600, 700 and 900 C for 2 h in a controlled oxygen atmo- Received in revised form 14 October 2015 sphere. GIXRD confirmed the tetragonal rutile phase of SnO which was further confirmed by Raman Accepted 6 November 2015 spectroscopy. The RBS measurements provided the thickness and chemical information of the film. Thick- Available online 10 November 2015 ness of the film was in the range of 6–12 nm and the presence of Sn and oxygen in the films are shown. Scanning electron microscopy revealed spherical particles of different sizes for films annealed at differ- Keywords: ent temperatures. The SnO thin film oxidized at 900 C was tested for methane gas sensing. A sensing SnO thin films response of 78.46% for 100 ppm of methane at an operating temperature of 100 C which is one of lowest GIXRD reported was obtained. Rutherford backscattering © 2015 Elsevier B.V. All rights reserved. Raman spectroscopy Methane gas sensor 1. Introduction nanostructures. Adding noble metals such as Pt, Pd and Ag http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Applied Surface Science Elsevier

Structural and gas sensing properties of ex-situ oxidized Sn grown by thermal evaporation

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Publisher
Elsevier
Copyright
Copyright © 2015 Elsevier B.V.
ISSN
0169-4332
eISSN
1873-5584
D.O.I.
10.1016/j.apsusc.2015.11.054
Publisher site
See Article on Publisher Site

Abstract

Article history: SnO thin films were obtained by ex-situ oxidation of Sn metal film deposited by thermal evaporation. Received 19 July 2015 The oxidation of the Sn film was carried out at 600, 700 and 900 C for 2 h in a controlled oxygen atmo- Received in revised form 14 October 2015 sphere. GIXRD confirmed the tetragonal rutile phase of SnO which was further confirmed by Raman Accepted 6 November 2015 spectroscopy. The RBS measurements provided the thickness and chemical information of the film. Thick- Available online 10 November 2015 ness of the film was in the range of 6–12 nm and the presence of Sn and oxygen in the films are shown. Scanning electron microscopy revealed spherical particles of different sizes for films annealed at differ- Keywords: ent temperatures. The SnO thin film oxidized at 900 C was tested for methane gas sensing. A sensing SnO thin films response of 78.46% for 100 ppm of methane at an operating temperature of 100 C which is one of lowest GIXRD reported was obtained. Rutherford backscattering © 2015 Elsevier B.V. All rights reserved. Raman spectroscopy Methane gas sensor 1. Introduction nanostructures. Adding noble metals such as Pt, Pd and Ag

Journal

Applied Surface ScienceElsevier

Published: Jan 1, 2016

References

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