Article history: SnO thin ﬁlms were obtained by ex-situ oxidation of Sn metal ﬁlm deposited by thermal evaporation. Received 19 July 2015 The oxidation of the Sn ﬁlm was carried out at 600, 700 and 900 C for 2 h in a controlled oxygen atmo- Received in revised form 14 October 2015 sphere. GIXRD conﬁrmed the tetragonal rutile phase of SnO which was further conﬁrmed by Raman Accepted 6 November 2015 spectroscopy. The RBS measurements provided the thickness and chemical information of the ﬁlm. Thick- Available online 10 November 2015 ness of the ﬁlm was in the range of 6–12 nm and the presence of Sn and oxygen in the ﬁlms are shown. Scanning electron microscopy revealed spherical particles of different sizes for ﬁlms annealed at differ- Keywords: ent temperatures. The SnO thin ﬁlm oxidized at 900 C was tested for methane gas sensing. A sensing SnO thin ﬁlms response of 78.46% for 100 ppm of methane at an operating temperature of 100 C which is one of lowest GIXRD reported was obtained. Rutherford backscattering © 2015 Elsevier B.V. All rights reserved. Raman spectroscopy Methane gas sensor 1. Introduction nanostructures. Adding noble metals such as Pt, Pd and Ag
Applied Surface Science – Elsevier
Published: Jan 1, 2016
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