Applied Surface Science 442 (2018) 487–500 Contents lists available at ScienceDirect Applied Surface Science journal homepage: www.elsevier.com/locate/apsusc Full Length Article Spectral artefacts post sputter-etching and how to cope with them – A case study of XPS on nitride-based coatings using monoatomic and cluster ion beams a,b,⇑ c a,1 Erik Lewin , Jonathan Counsell , Jörg Patscheider Laboratory for Nanoscale Materials Science, Empa, Überlandstrasse 129, CH-8600 Dübendorf, Switzerland Inorganic Chemistry, Department of Chemistry – Ångström Laboratory, Uppsala university, Box 538, SE-751 21 Uppsala, Sweden Kratos Analytical Ltd, Trafford Wharf Road, Manchester M17 1G, United Kingdom article i nfo abstract Article history: The issue of artefacts due to sputter-etching has been investigated for a group of AlN-based thin ﬁlm Received 22 August 2017 materials with varying thermodynamical stability. Stability of the materials was controlled by alloying Revised 29 January 2018 AlN with the group 14 elements Si, Ge or Sn in two different concentrations. The coatings were Accepted 19 February 2018 + sputter-etched with monoatomic Ar with energies between 0.2 and 4.0 keV to study the sensitivity of Available online 21 February 2018 the materials for sputter damage. The use of Ar clusters to remove an oxidised surface layer was also
Applied Surface Science – Elsevier
Published: Jun 1, 2018
It’s your single place to instantly
discover and read the research
that matters to you.
Enjoy affordable access to
over 18 million articles from more than
15,000 peer-reviewed journals.
All for just $49/month
Query the DeepDyve database, plus search all of PubMed and Google Scholar seamlessly
Save any article or search result from DeepDyve, PubMed, and Google Scholar... all in one place.
Get unlimited, online access to over 18 million full-text articles from more than 15,000 scientific journals.
Read from thousands of the leading scholarly journals from SpringerNature, Elsevier, Wiley-Blackwell, Oxford University Press and more.
All the latest content is available, no embargo periods.
“Hi guys, I cannot tell you how much I love this resource. Incredible. I really believe you've hit the nail on the head with this site in regards to solving the research-purchase issue.”Daniel C.
“Whoa! It’s like Spotify but for academic articles.”@Phil_Robichaud
“I must say, @deepdyve is a fabulous solution to the independent researcher's problem of #access to #information.”@deepthiw
“My last article couldn't be possible without the platform @deepdyve that makes journal papers cheaper.”@JoseServera