Single- and dual-wavelength laser pulses induced modification in 10ÿ(Al/Ti)/Si multilayer system

Single- and dual-wavelength laser pulses induced modification in 10ÿ(Al/Ti)/Si multilayer system Article history: The surface morphology of the ablation craters created in the multilayer 10×(Al/Ti)/Si system by nanosec- Received 9 July 2015 ond laser pulses at single- and dual wavelength has been studied experimentally and numerically. Received in revised form 5 September 2015 A complex multilayer thin film including ten (Al/Ti) bilayers deposited by ion sputtering on Si(1 0 0) Accepted 27 October 2015 substrate to a total thickness of 260 nm were illuminated at different laser irradiance in the range Available online 10 November 2015 9 −2 0.25–3.5 × 10 W cm . Single pulse laser irradiation was done at normal incidence in air, with the single wavelength, either at 532 nm or 1064 nm or with both laser light simultaneously in the ratio of 1:10 for Keywords: energy per pulse between second harmonic and 1064 nm. Most of the absorbed laser energy was rapidly Dual-wavelength pulses transformed into heat, producing intensive modifications of composition and morphology on the sample Laser ablation surface. The results show an increase in surface roughness, formation of specific nanostructures, appear- Crater formation ance of hydrodynamic features and ablation of surface material with crater formation. Applying a small Nanostructures fraction (10%) of the second http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Applied Surface Science Elsevier

Single- and dual-wavelength laser pulses induced modification in 10ÿ(Al/Ti)/Si multilayer system

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Publisher
Elsevier
Copyright
Copyright © 2015 Elsevier B.V.
ISSN
0169-4332
eISSN
1873-5584
D.O.I.
10.1016/j.apsusc.2015.10.203
Publisher site
See Article on Publisher Site

Abstract

Article history: The surface morphology of the ablation craters created in the multilayer 10×(Al/Ti)/Si system by nanosec- Received 9 July 2015 ond laser pulses at single- and dual wavelength has been studied experimentally and numerically. Received in revised form 5 September 2015 A complex multilayer thin film including ten (Al/Ti) bilayers deposited by ion sputtering on Si(1 0 0) Accepted 27 October 2015 substrate to a total thickness of 260 nm were illuminated at different laser irradiance in the range Available online 10 November 2015 9 −2 0.25–3.5 × 10 W cm . Single pulse laser irradiation was done at normal incidence in air, with the single wavelength, either at 532 nm or 1064 nm or with both laser light simultaneously in the ratio of 1:10 for Keywords: energy per pulse between second harmonic and 1064 nm. Most of the absorbed laser energy was rapidly Dual-wavelength pulses transformed into heat, producing intensive modifications of composition and morphology on the sample Laser ablation surface. The results show an increase in surface roughness, formation of specific nanostructures, appear- Crater formation ance of hydrodynamic features and ablation of surface material with crater formation. Applying a small Nanostructures fraction (10%) of the second

Journal

Applied Surface ScienceElsevier

Published: Jan 1, 2016

References

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