Polycrystalline La1-xSrxMnO3 films on silicon: Influence of post-Deposition annealing on structural, (Magneto-)Optical, and (Magneto-)Electrical properties

Polycrystalline La1-xSrxMnO3 films on silicon: Influence of post-Deposition annealing on... Article history: The integration of La Sr MnO (LSMO) thin film technology into established industrial silicon processes 1-x x 3 Received 30 March 2017 is regarded as challenging due to lattice mismatch, thermal expansion, and chemical reactions at the Received in revised form 12 July 2017 interface of LSMO and silicon. In this work, we investigated the physical properties of thin La Sr MnO 0.73 0.27 3 Accepted 4 August 2017 films deposited by magnetron sputtering on silicon without a lattice matching buffer layer. The influence Available online 12 August 2017 of a post-deposition annealing treatment on the structural, (magneto-)optical, and (magneto-)electrical properties was investigated by a variety of techniques. Using Rutherford backscattering spectroscopy, Keywords: atomic force microscopy, Raman spectroscopy, and X-ray diffraction we could show that the thin films LSMO exhibit a polycrystalline, rhombohedral structure after a post-deposition annealing of at least 700 C. The Magnetoresistivity dielectric tensor in the spectral range from 1.7 eV to 5 eV determined from spectroscopic ellipsometry in Perovskite oxides combination with magneto-optical Kerr effect spectroscopy was found to be comparable to that of lattice Spectroscopic ellipsometry Magneto-opical kerr effect spectroscopy matched films on single crystal substrates reported in literature [1]. The values http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Applied Surface Science Elsevier

Polycrystalline La1-xSrxMnO3 films on silicon: Influence of post-Deposition annealing on structural, (Magneto-)Optical, and (Magneto-)Electrical properties

Loading next page...
 
/lp/elsevier/polycrystalline-la1-xsrxmno3-films-on-silicon-influence-of-post-0IeBUuzf7n
Publisher
Elsevier
Copyright
Copyright © 2017 Elsevier B.V.
ISSN
0169-4332
eISSN
1873-5584
D.O.I.
10.1016/j.apsusc.2017.08.046
Publisher site
See Article on Publisher Site

Abstract

Article history: The integration of La Sr MnO (LSMO) thin film technology into established industrial silicon processes 1-x x 3 Received 30 March 2017 is regarded as challenging due to lattice mismatch, thermal expansion, and chemical reactions at the Received in revised form 12 July 2017 interface of LSMO and silicon. In this work, we investigated the physical properties of thin La Sr MnO 0.73 0.27 3 Accepted 4 August 2017 films deposited by magnetron sputtering on silicon without a lattice matching buffer layer. The influence Available online 12 August 2017 of a post-deposition annealing treatment on the structural, (magneto-)optical, and (magneto-)electrical properties was investigated by a variety of techniques. Using Rutherford backscattering spectroscopy, Keywords: atomic force microscopy, Raman spectroscopy, and X-ray diffraction we could show that the thin films LSMO exhibit a polycrystalline, rhombohedral structure after a post-deposition annealing of at least 700 C. The Magnetoresistivity dielectric tensor in the spectral range from 1.7 eV to 5 eV determined from spectroscopic ellipsometry in Perovskite oxides combination with magneto-optical Kerr effect spectroscopy was found to be comparable to that of lattice Spectroscopic ellipsometry Magneto-opical kerr effect spectroscopy matched films on single crystal substrates reported in literature [1]. The values

Journal

Applied Surface ScienceElsevier

Published: Jan 1, 2018

References

You’re reading a free preview. Subscribe to read the entire article.


DeepDyve is your
personal research library

It’s your single place to instantly
discover and read the research
that matters to you.

Enjoy affordable access to
over 18 million articles from more than
15,000 peer-reviewed journals.

All for just $49/month

Explore the DeepDyve Library

Search

Query the DeepDyve database, plus search all of PubMed and Google Scholar seamlessly

Organize

Save any article or search result from DeepDyve, PubMed, and Google Scholar... all in one place.

Access

Get unlimited, online access to over 18 million full-text articles from more than 15,000 scientific journals.

Your journals are on DeepDyve

Read from thousands of the leading scholarly journals from SpringerNature, Elsevier, Wiley-Blackwell, Oxford University Press and more.

All the latest content is available, no embargo periods.

See the journals in your area

DeepDyve

Freelancer

DeepDyve

Pro

Price

FREE

$49/month
$360/year

Save searches from
Google Scholar,
PubMed

Create lists to
organize your research

Export lists, citations

Read DeepDyve articles

Abstract access only

Unlimited access to over
18 million full-text articles

Print

20 pages / month

PDF Discount

20% off