On-chip nanostructuring and impedance trimming of transparent and flexible ITO electrodes by laser induced coherent sub-20nm cuts

On-chip nanostructuring and impedance trimming of transparent and flexible ITO electrodes by... Article history: In this work, the effect of laser-induced nanostructuring of transparent indium tin oxide (ITO) electrodes Received 13 May 2015 on flexible glass is investigated. Multi-electrode arrays (MEA) for electrical and optical characterization Received in revised form 6 October 2015 of biological cells were fabricated using standard MEMS technologies. Optimal sputter parameters con- Accepted 16 October 2015 cerning oxygen flow, sputter power and ambient pressure for ITO layers with both good optical and Available online 5 November 2015 electrical properties were determined. Afterwards, coherent sub-20 nm wide and 150 nm deep nanocuts of many micrometers in length were generated within the ITO electrodes by a sub-15 femtosecond (fs) Keywords: pulsed laser. The influence of laser processing on the electrical and optical properties of electrodes was Nanostructuring investigated. The electrochemical impedance of the manufactured electrodes was measured before and Laser trimming after laser modification using electrochemical impedance spectroscopy. A small reduction in electrode Microelectrodes impedance was observed. These nanostructured electrodes show also polarizing effects by the visible Indium tin oxide Nanocuts spectrum. Impedance spectroscopy © 2015 Elsevier B.V. All rights reserved. 1. Introduction electrode impedance is to increase the effective surface of an elec- trode by creating a micro-rough, http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Applied Surface Science Elsevier

On-chip nanostructuring and impedance trimming of transparent and flexible ITO electrodes by laser induced coherent sub-20nm cuts

Loading next page...
 
/lp/elsevier/on-chip-nanostructuring-and-impedance-trimming-of-transparent-and-CTblN0N9dV
Publisher
Elsevier
Copyright
Copyright © 2015 Elsevier B.V.
ISSN
0169-4332
eISSN
1873-5584
D.O.I.
10.1016/j.apsusc.2015.10.119
Publisher site
See Article on Publisher Site

Abstract

Article history: In this work, the effect of laser-induced nanostructuring of transparent indium tin oxide (ITO) electrodes Received 13 May 2015 on flexible glass is investigated. Multi-electrode arrays (MEA) for electrical and optical characterization Received in revised form 6 October 2015 of biological cells were fabricated using standard MEMS technologies. Optimal sputter parameters con- Accepted 16 October 2015 cerning oxygen flow, sputter power and ambient pressure for ITO layers with both good optical and Available online 5 November 2015 electrical properties were determined. Afterwards, coherent sub-20 nm wide and 150 nm deep nanocuts of many micrometers in length were generated within the ITO electrodes by a sub-15 femtosecond (fs) Keywords: pulsed laser. The influence of laser processing on the electrical and optical properties of electrodes was Nanostructuring investigated. The electrochemical impedance of the manufactured electrodes was measured before and Laser trimming after laser modification using electrochemical impedance spectroscopy. A small reduction in electrode Microelectrodes impedance was observed. These nanostructured electrodes show also polarizing effects by the visible Indium tin oxide Nanocuts spectrum. Impedance spectroscopy © 2015 Elsevier B.V. All rights reserved. 1. Introduction electrode impedance is to increase the effective surface of an elec- trode by creating a micro-rough,

Journal

Applied Surface ScienceElsevier

Published: Jan 1, 2016

References

You’re reading a free preview. Subscribe to read the entire article.


DeepDyve is your
personal research library

It’s your single place to instantly
discover and read the research
that matters to you.

Enjoy affordable access to
over 18 million articles from more than
15,000 peer-reviewed journals.

All for just $49/month

Explore the DeepDyve Library

Search

Query the DeepDyve database, plus search all of PubMed and Google Scholar seamlessly

Organize

Save any article or search result from DeepDyve, PubMed, and Google Scholar... all in one place.

Access

Get unlimited, online access to over 18 million full-text articles from more than 15,000 scientific journals.

Your journals are on DeepDyve

Read from thousands of the leading scholarly journals from SpringerNature, Elsevier, Wiley-Blackwell, Oxford University Press and more.

All the latest content is available, no embargo periods.

See the journals in your area

DeepDyve

Freelancer

DeepDyve

Pro

Price

FREE

$49/month
$360/year

Save searches from
Google Scholar,
PubMed

Create lists to
organize your research

Export lists, citations

Read DeepDyve articles

Abstract access only

Unlimited access to over
18 million full-text articles

Print

20 pages / month

PDF Discount

20% off