Article history: In this work, the effect of laser-induced nanostructuring of transparent indium tin oxide (ITO) electrodes Received 13 May 2015 on ﬂexible glass is investigated. Multi-electrode arrays (MEA) for electrical and optical characterization Received in revised form 6 October 2015 of biological cells were fabricated using standard MEMS technologies. Optimal sputter parameters con- Accepted 16 October 2015 cerning oxygen ﬂow, sputter power and ambient pressure for ITO layers with both good optical and Available online 5 November 2015 electrical properties were determined. Afterwards, coherent sub-20 nm wide and 150 nm deep nanocuts of many micrometers in length were generated within the ITO electrodes by a sub-15 femtosecond (fs) Keywords: pulsed laser. The inﬂuence of laser processing on the electrical and optical properties of electrodes was Nanostructuring investigated. The electrochemical impedance of the manufactured electrodes was measured before and Laser trimming after laser modiﬁcation using electrochemical impedance spectroscopy. A small reduction in electrode Microelectrodes impedance was observed. These nanostructured electrodes show also polarizing effects by the visible Indium tin oxide Nanocuts spectrum. Impedance spectroscopy © 2015 Elsevier B.V. All rights reserved. 1. Introduction electrode impedance is to increase the effective surface of an elec- trode by creating a micro-rough,
Applied Surface Science – Elsevier
Published: Jan 1, 2016
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