Mechanical Systems and Signal Processing 112 (2018) 10–21 Contents lists available at ScienceDirect Mechanical Systems and Signal Processing journal homepage: www.elsevier.com/locate/ymssp Nondestructive gap dimension estimation of electrostatic MEMS resonators from electrical measurements a,⇑ a a b A. Brenes , B. Vysotskyi , E. Lefeuvre , J. Juillard Centre for Nanoscience and Nanotechnology, Univ. Paris Sud – CNRS, Université Paris-Saclay, France GeePs | Group of electrical engineering – Paris, UMR CNRS 8507, CentraleSupélec, Univ. Paris-Sud, Sorbonne Universités, UPMC Univ. Paris 06, 3,11 rue Joliot-Curie, Plateau de Moulon F-91192, Gif-sur-Yvette Cedex, France article i nfo ab stra ct Article history: This paper proves that critical geometric dimensions of a capacitive resonator can be Received 30 November 2017 estimated from nondestructive electrical measurements. In particular, the gap between Received in revised form 18 February 2018 the electrodes at rest is precisely determined. The imperfect verticality of ﬂanks introduced Accepted 6 April 2018 by defects of the manufacturing process is also quantiﬁed. The presented approach is Available online 22 April 2018 especially interesting compared to time-consuming observations with conventional microscopy techniques (optical, SEM,...) which are complex to automate. Furthermore, it Keywords: is the ﬁrst available nondestructive way to determine the fabrication defects coming
Mechanical Systems and Signal Processing – Elsevier
Published: Nov 1, 2018
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