Nondestructive gap dimension estimation of electrostatic MEMS resonators from electrical measurements

Nondestructive gap dimension estimation of electrostatic MEMS resonators from electrical... Mechanical Systems and Signal Processing 112 (2018) 10–21 Contents lists available at ScienceDirect Mechanical Systems and Signal Processing journal homepage: www.elsevier.com/locate/ymssp Nondestructive gap dimension estimation of electrostatic MEMS resonators from electrical measurements a,⇑ a a b A. Brenes , B. Vysotskyi , E. Lefeuvre , J. Juillard Centre for Nanoscience and Nanotechnology, Univ. Paris Sud – CNRS, Université Paris-Saclay, France GeePs | Group of electrical engineering – Paris, UMR CNRS 8507, CentraleSupélec, Univ. Paris-Sud, Sorbonne Universités, UPMC Univ. Paris 06, 3,11 rue Joliot-Curie, Plateau de Moulon F-91192, Gif-sur-Yvette Cedex, France article i nfo ab stra ct Article history: This paper proves that critical geometric dimensions of a capacitive resonator can be Received 30 November 2017 estimated from nondestructive electrical measurements. In particular, the gap between Received in revised form 18 February 2018 the electrodes at rest is precisely determined. The imperfect verticality of flanks introduced Accepted 6 April 2018 by defects of the manufacturing process is also quantified. The presented approach is Available online 22 April 2018 especially interesting compared to time-consuming observations with conventional microscopy techniques (optical, SEM,...) which are complex to automate. Furthermore, it Keywords: is the first available nondestructive way to determine the fabrication defects coming http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Mechanical Systems and Signal Processing Elsevier

Nondestructive gap dimension estimation of electrostatic MEMS resonators from electrical measurements

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Publisher
Elsevier
Copyright
Copyright © 2018 Elsevier Ltd
ISSN
0888-3270
eISSN
1096-1216
D.O.I.
10.1016/j.ymssp.2018.04.016
Publisher site
See Article on Publisher Site

Abstract

Mechanical Systems and Signal Processing 112 (2018) 10–21 Contents lists available at ScienceDirect Mechanical Systems and Signal Processing journal homepage: www.elsevier.com/locate/ymssp Nondestructive gap dimension estimation of electrostatic MEMS resonators from electrical measurements a,⇑ a a b A. Brenes , B. Vysotskyi , E. Lefeuvre , J. Juillard Centre for Nanoscience and Nanotechnology, Univ. Paris Sud – CNRS, Université Paris-Saclay, France GeePs | Group of electrical engineering – Paris, UMR CNRS 8507, CentraleSupélec, Univ. Paris-Sud, Sorbonne Universités, UPMC Univ. Paris 06, 3,11 rue Joliot-Curie, Plateau de Moulon F-91192, Gif-sur-Yvette Cedex, France article i nfo ab stra ct Article history: This paper proves that critical geometric dimensions of a capacitive resonator can be Received 30 November 2017 estimated from nondestructive electrical measurements. In particular, the gap between Received in revised form 18 February 2018 the electrodes at rest is precisely determined. The imperfect verticality of flanks introduced Accepted 6 April 2018 by defects of the manufacturing process is also quantified. The presented approach is Available online 22 April 2018 especially interesting compared to time-consuming observations with conventional microscopy techniques (optical, SEM,...) which are complex to automate. Furthermore, it Keywords: is the first available nondestructive way to determine the fabrication defects coming

Journal

Mechanical Systems and Signal ProcessingElsevier

Published: Nov 1, 2018

References

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