Materials processing with superposed Bessel beams

Materials processing with superposed Bessel beams Article history: We report experimental results of femtosecond laser processing on the surface of glass and metal Received 21 August 2015 thin film using superposed Bessel beams. These beams are generated by a combination of a spatial Received in revised form 21 October 2015 light modulator (SLM) and an axicon with >50% efficiency, and they possess the long depth-of-focus Accepted 8 November 2015 (propagation-invariant) property as found in ordinary Bessel beams. Through micromachining experi- Available online 14 November 2015 ments using femtosecond laser pulses, we show that multiple craters can be fabricated on glass with single-shot exposure, and the 1+(−1) superposed beam can reduce collateral damage caused by the rings Keywords: in zero-order Bessel beams in the scribing of metal thin film. Materials processing © 2015 Elsevier B.V. All rights reserved. Femtosecond laser Spatial lightmodulator Beam-shaping Glass Thin film solar cell 1. Introduction energy) so that only the intensity of the central lobe exceeds dam- age threshold [13], these rings cause quality issues when high laser Spatial laser beam shaping provides the possibility of design- power is required, such as in scribing deep grooves [19]. ing beam shapes that are optimized for specific applications There currently exist two approaches http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Applied Surface Science Elsevier

Materials processing with superposed Bessel beams

Loading next page...
 
/lp/elsevier/materials-processing-with-superposed-bessel-beams-BAjzY0ucgH
Publisher
Elsevier
Copyright
Copyright © 2015 Elsevier B.V.
ISSN
0169-4332
eISSN
1873-5584
D.O.I.
10.1016/j.apsusc.2015.11.074
Publisher site
See Article on Publisher Site

Abstract

Article history: We report experimental results of femtosecond laser processing on the surface of glass and metal Received 21 August 2015 thin film using superposed Bessel beams. These beams are generated by a combination of a spatial Received in revised form 21 October 2015 light modulator (SLM) and an axicon with >50% efficiency, and they possess the long depth-of-focus Accepted 8 November 2015 (propagation-invariant) property as found in ordinary Bessel beams. Through micromachining experi- Available online 14 November 2015 ments using femtosecond laser pulses, we show that multiple craters can be fabricated on glass with single-shot exposure, and the 1+(−1) superposed beam can reduce collateral damage caused by the rings Keywords: in zero-order Bessel beams in the scribing of metal thin film. Materials processing © 2015 Elsevier B.V. All rights reserved. Femtosecond laser Spatial lightmodulator Beam-shaping Glass Thin film solar cell 1. Introduction energy) so that only the intensity of the central lobe exceeds dam- age threshold [13], these rings cause quality issues when high laser Spatial laser beam shaping provides the possibility of design- power is required, such as in scribing deep grooves [19]. ing beam shapes that are optimized for specific applications There currently exist two approaches

Journal

Applied Surface ScienceElsevier

Published: Jan 1, 2016

References

You’re reading a free preview. Subscribe to read the entire article.


DeepDyve is your
personal research library

It’s your single place to instantly
discover and read the research
that matters to you.

Enjoy affordable access to
over 12 million articles from more than
10,000 peer-reviewed journals.

All for just $49/month

Explore the DeepDyve Library

Unlimited reading

Read as many articles as you need. Full articles with original layout, charts and figures. Read online, from anywhere.

Stay up to date

Keep up with your field with Personalized Recommendations and Follow Journals to get automatic updates.

Organize your research

It’s easy to organize your research with our built-in tools.

Your journals are on DeepDyve

Read from thousands of the leading scholarly journals from SpringerNature, Elsevier, Wiley-Blackwell, Oxford University Press and more.

All the latest content is available, no embargo periods.

See the journals in your area

Monthly Plan

  • Read unlimited articles
  • Personalized recommendations
  • No expiration
  • Print 20 pages per month
  • 20% off on PDF purchases
  • Organize your research
  • Get updates on your journals and topic searches

$49/month

Start Free Trial

14-day Free Trial

Best Deal — 39% off

Annual Plan

  • All the features of the Professional Plan, but for 39% off!
  • Billed annually
  • No expiration
  • For the normal price of 10 articles elsewhere, you get one full year of unlimited access to articles.

$588

$360/year

billed annually
Start Free Trial

14-day Free Trial