Materials processing with superposed Bessel beams

Materials processing with superposed Bessel beams Article history: We report experimental results of femtosecond laser processing on the surface of glass and metal Received 21 August 2015 thin film using superposed Bessel beams. These beams are generated by a combination of a spatial Received in revised form 21 October 2015 light modulator (SLM) and an axicon with >50% efficiency, and they possess the long depth-of-focus Accepted 8 November 2015 (propagation-invariant) property as found in ordinary Bessel beams. Through micromachining experi- Available online 14 November 2015 ments using femtosecond laser pulses, we show that multiple craters can be fabricated on glass with single-shot exposure, and the 1+(−1) superposed beam can reduce collateral damage caused by the rings Keywords: in zero-order Bessel beams in the scribing of metal thin film. Materials processing © 2015 Elsevier B.V. All rights reserved. Femtosecond laser Spatial lightmodulator Beam-shaping Glass Thin film solar cell 1. Introduction energy) so that only the intensity of the central lobe exceeds dam- age threshold [13], these rings cause quality issues when high laser Spatial laser beam shaping provides the possibility of design- power is required, such as in scribing deep grooves [19]. ing beam shapes that are optimized for specific applications There currently exist two approaches http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Applied Surface Science Elsevier

Materials processing with superposed Bessel beams

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Publisher
Elsevier
Copyright
Copyright © 2015 Elsevier B.V.
ISSN
0169-4332
eISSN
1873-5584
D.O.I.
10.1016/j.apsusc.2015.11.074
Publisher site
See Article on Publisher Site

Abstract

Article history: We report experimental results of femtosecond laser processing on the surface of glass and metal Received 21 August 2015 thin film using superposed Bessel beams. These beams are generated by a combination of a spatial Received in revised form 21 October 2015 light modulator (SLM) and an axicon with >50% efficiency, and they possess the long depth-of-focus Accepted 8 November 2015 (propagation-invariant) property as found in ordinary Bessel beams. Through micromachining experi- Available online 14 November 2015 ments using femtosecond laser pulses, we show that multiple craters can be fabricated on glass with single-shot exposure, and the 1+(−1) superposed beam can reduce collateral damage caused by the rings Keywords: in zero-order Bessel beams in the scribing of metal thin film. Materials processing © 2015 Elsevier B.V. All rights reserved. Femtosecond laser Spatial lightmodulator Beam-shaping Glass Thin film solar cell 1. Introduction energy) so that only the intensity of the central lobe exceeds dam- age threshold [13], these rings cause quality issues when high laser Spatial laser beam shaping provides the possibility of design- power is required, such as in scribing deep grooves [19]. ing beam shapes that are optimized for specific applications There currently exist two approaches

Journal

Applied Surface ScienceElsevier

Published: Jan 1, 2016

References

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