Article history: We report experimental results of femtosecond laser processing on the surface of glass and metal Received 21 August 2015 thin ﬁlm using superposed Bessel beams. These beams are generated by a combination of a spatial Received in revised form 21 October 2015 light modulator (SLM) and an axicon with >50% efﬁciency, and they possess the long depth-of-focus Accepted 8 November 2015 (propagation-invariant) property as found in ordinary Bessel beams. Through micromachining experi- Available online 14 November 2015 ments using femtosecond laser pulses, we show that multiple craters can be fabricated on glass with single-shot exposure, and the 1+(−1) superposed beam can reduce collateral damage caused by the rings Keywords: in zero-order Bessel beams in the scribing of metal thin ﬁlm. Materials processing © 2015 Elsevier B.V. All rights reserved. Femtosecond laser Spatial lightmodulator Beam-shaping Glass Thin ﬁlm solar cell 1. Introduction energy) so that only the intensity of the central lobe exceeds dam- age threshold , these rings cause quality issues when high laser Spatial laser beam shaping provides the possibility of design- power is required, such as in scribing deep grooves . ing beam shapes that are optimized for speciﬁc applications There currently exist two approaches
Applied Surface Science – Elsevier
Published: Jan 1, 2016
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