Diffraction efficiency for transmission gratings with period-to-wavelength ratios smaller than 0.6 e.g. for laser pulse compression is mainly limited due to reflection losses from imperfect effective refractive index matching. In our contribution, different approaches for achieving high efficiencies by reducing these losses are discussed based on 1d and 2d rigorous coupled wave analysis. These include multilayers underneath the corrugation, sub-wavelength gratings and optimized non-binary profiles. Experimental results from the manufacturing of 1700 l/mm gratings for 1030 nm center wavelength using two-beam interference lithography and reactive ion beam etching are presented. Diffraction efficiencies of above 96% were achieved, significantly exceeding the theoretical limit for widely used monolithic binary profiles in this application.
Microelectronic Engineering – Elsevier
Published: May 5, 2018
It’s your single place to instantly
discover and read the research
that matters to you.
Enjoy affordable access to
over 12 million articles from more than
10,000 peer-reviewed journals.
All for just $49/month
Read as many articles as you need. Full articles with original layout, charts and figures. Read online, from anywhere.
Keep up with your field with Personalized Recommendations and Follow Journals to get automatic updates.
It’s easy to organize your research with our built-in tools.
Read from thousands of the leading scholarly journals from SpringerNature, Elsevier, Wiley-Blackwell, Oxford University Press and more.
All the latest content is available, no embargo periods.
“Hi guys, I cannot tell you how much I love this resource. Incredible. I really believe you've hit the nail on the head with this site in regards to solving the research-purchase issue.”Daniel C.
“Whoa! It’s like Spotify but for academic articles.”@Phil_Robichaud
“I must say, @deepdyve is a fabulous solution to the independent researcher's problem of #access to #information.”@deepthiw
“My last article couldn't be possible without the platform @deepdyve that makes journal papers cheaper.”@JoseServera