High resolution polymer coated strain sensors for in-liquid operation

High resolution polymer coated strain sensors for in-liquid operation Metallic strain gauges are well studied structures for their use in force sensing. Their fabrication is rather simple, easily compatible with many techniques are broadly scalable in both quantity and resolution. Here we present a fabrication process for high resolution strain sensors (down to the nN) that can also be operated in liquid, i.e. for life sciences applications. This fabrication method offers a very high yield and opens new possibilities for bioengineering, as for example single cell studies. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Microelectronic Engineering Elsevier

High resolution polymer coated strain sensors for in-liquid operation

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Publisher
Elsevier
Copyright
Copyright © 2018 Elsevier B.V.
ISSN
0167-9317
eISSN
1873-5568
D.O.I.
10.1016/j.mee.2018.01.020
Publisher site
See Article on Publisher Site

Abstract

Metallic strain gauges are well studied structures for their use in force sensing. Their fabrication is rather simple, easily compatible with many techniques are broadly scalable in both quantity and resolution. Here we present a fabrication process for high resolution strain sensors (down to the nN) that can also be operated in liquid, i.e. for life sciences applications. This fabrication method offers a very high yield and opens new possibilities for bioengineering, as for example single cell studies.

Journal

Microelectronic EngineeringElsevier

Published: May 5, 2018

References

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