Fabrication of periodic nanostructures using dynamic plowing lithography with the tip of an atomic force microscope

Fabrication of periodic nanostructures using dynamic plowing lithography with the tip of an... •A dynamic plowing lithography approach was proposed to fabricate periodic nanostructures on PMMA thin films using an AFM.•A “combination writing” method was proposed to fabricate groove array with a wavelength of 30nm.•The density of the nanodots fabricated by the combination writing method could be achieved as high as 1.9×109 per mm2. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Applied Surface Science Elsevier

Fabrication of periodic nanostructures using dynamic plowing lithography with the tip of an atomic force microscope

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Publisher
Elsevier
Copyright
Copyright © 2017 Elsevier B.V.
ISSN
0169-4332
eISSN
1873-5584
D.O.I.
10.1016/j.apsusc.2017.08.134
Publisher site
See Article on Publisher Site

Abstract

•A dynamic plowing lithography approach was proposed to fabricate periodic nanostructures on PMMA thin films using an AFM.•A “combination writing” method was proposed to fabricate groove array with a wavelength of 30nm.•The density of the nanodots fabricated by the combination writing method could be achieved as high as 1.9×109 per mm2.

Journal

Applied Surface ScienceElsevier

Published: Jan 1, 2018

References

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