Effect of coadsorption of water and alcohol vapor on the nanowear of silicon

Effect of coadsorption of water and alcohol vapor on the nanowear of silicon Using an environment-controlled atomic force microscope, the nanowear of silicon against SiO2 microsphere was investigated under various relative humidity (RH) and ethanol partial pressure (Pa/Psat) conditions. When RH was below 10%, there was no discernable wear of the substrate in any Pa/Psat conditions. However, when RH>10%, although the contact pressure (1.3GPa) was far less than the yield stress of silicon material (7GPa), the occurrence of tribochemical wear was observed on silicon surface without ethanol adsorption. When ethanol vapor was introduced, the wear of silicon was inhibited fully or partially depending on RH. At RH below 50%, there was a critical ethanol partial pressure above which tribochemical reaction was completely suppressed and no wear was generated on silicon surface. At RH above 50%, the wear of silicon could be significantly reduced, but not completely, with the increase of ethanol partial pressure. Upon addition of ethanol vapor, the frictional energy dissipation decreased and the energy barrier for tribochemical reaction could also become larger. These factors could explain the lubrication effect of the adsorbate ethanol layer in humid environment. The RH and ethanol partial pressure conditions for the lubrication of Si/SiO2 sliding pairs were identified, which can be used for optimizing the MEMS operation conditions without failure due to wear. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Wear Elsevier

Effect of coadsorption of water and alcohol vapor on the nanowear of silicon

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Publisher
Elsevier
Copyright
Copyright © 2015 Elsevier B.V.
ISSN
0043-1648
eISSN
1873-2577
D.O.I.
10.1016/j.wear.2015.02.052
Publisher site
See Article on Publisher Site

Abstract

Using an environment-controlled atomic force microscope, the nanowear of silicon against SiO2 microsphere was investigated under various relative humidity (RH) and ethanol partial pressure (Pa/Psat) conditions. When RH was below 10%, there was no discernable wear of the substrate in any Pa/Psat conditions. However, when RH>10%, although the contact pressure (1.3GPa) was far less than the yield stress of silicon material (7GPa), the occurrence of tribochemical wear was observed on silicon surface without ethanol adsorption. When ethanol vapor was introduced, the wear of silicon was inhibited fully or partially depending on RH. At RH below 50%, there was a critical ethanol partial pressure above which tribochemical reaction was completely suppressed and no wear was generated on silicon surface. At RH above 50%, the wear of silicon could be significantly reduced, but not completely, with the increase of ethanol partial pressure. Upon addition of ethanol vapor, the frictional energy dissipation decreased and the energy barrier for tribochemical reaction could also become larger. These factors could explain the lubrication effect of the adsorbate ethanol layer in humid environment. The RH and ethanol partial pressure conditions for the lubrication of Si/SiO2 sliding pairs were identified, which can be used for optimizing the MEMS operation conditions without failure due to wear.

Journal

WearElsevier

Published: May 1, 2015

References

  • Nanotribology and nanomechanics of MEMS/NEMS and BioMEMS/BioNEMS materials and devices
    Bhushan, B.
  • Wear characteristics of large aspect ratio silicon microbearing systems
    Demiri, S.; Boedo, S.; Holsen, L.S.
  • Wear of silicon surfaces in MEMS
    Ku, I.S.Y.; Reddyhoff, T.; Holmes, A.S.; Spikes, H.A.
  • Is 2nm DLC coating enough to resist the nanowear of silicon
    Chen, L.; Yang, M.C.; Song, C.F.; Yu, B.J.; Qian, L.M.
  • Friction-induced hillocks on monocrystalline silicon in atmosphere and in vacuum
    Yu, B.J.; Qian, L.M.; Dong, H.S.; Yu, J.X.; Zhou, Z.R.
  • A generalized analytical model for the elastic deformation of an adhesive contact between a sphere and a flat surface
    Schwarz, U.D.
  • Single asperity tribochemical wear of silicon nitride studied by atomic force microscopy
    Maw, W.; Stevens, F.; Langford, S.C.; Dickinson, J.T.
  • Effects of adsorbate coverage and capillary on nano-asperity friction in atmosphere containing organic vapor
    Asay, D.B.; Hsiao, E.; Kim, S.H.

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