Direct writing of sub-wavelength ripples on silicon using femtosecond laser at high repetition rate

Direct writing of sub-wavelength ripples on silicon using femtosecond laser at high repetition rate Article history: The near sub-wavelength and deep sub-wavelength ripples on monocrystalline silicon were formed in Received 5 June 2015 air by using linearly polarized and high repetition rate femtosecond laser pulses (f = 76 MHz,  = 800 nm, Received in revised form = 50 fs). The effects of laser pulse energy, direct writing speed and laser polarization on silicon surface 26 September 2015 morphology are studied. When the laser pulse energy is 2 nJ/pulse and the direct writing speed varies Accepted 8 November 2015 from 10 to 25 mm/s, the near sub-wavelength ripples (NSRs) with orientation perpendicular to the laser Available online 14 November 2015 polarization are generated. While the direct writing speed reaches 30 mm/s, the direction of the obtained deep sub-wavelength ripples (DSRs) suddenly changes and becomes parallel to the laser polarization, Keywords: rarely reported so far for femtosecond laser irradiation of silicon. Meanwhile, we extend the Sipe–Drude Laser-induced periodic surface structures interference theory by considering the thermal excitation, and numerically calculate the efficacy factor (LIPSSs) for silicon irradiated by femtosecond laser pulses. The revised Sipe–Drude interference theoretical results Near sub-wavelength ripples Deep sub-wavelength ripples show good agreement with the periods and orientations of sub-wavelength ripples. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Applied Surface Science Elsevier

Direct writing of sub-wavelength ripples on silicon using femtosecond laser at high repetition rate

Loading next page...
 
/lp/elsevier/direct-writing-of-sub-wavelength-ripples-on-silicon-using-femtosecond-l0WG009pZK
Publisher
Elsevier
Copyright
Copyright © 2015 Elsevier B.V.
ISSN
0169-4332
eISSN
1873-5584
D.O.I.
10.1016/j.apsusc.2015.11.082
Publisher site
See Article on Publisher Site

Abstract

Article history: The near sub-wavelength and deep sub-wavelength ripples on monocrystalline silicon were formed in Received 5 June 2015 air by using linearly polarized and high repetition rate femtosecond laser pulses (f = 76 MHz,  = 800 nm, Received in revised form = 50 fs). The effects of laser pulse energy, direct writing speed and laser polarization on silicon surface 26 September 2015 morphology are studied. When the laser pulse energy is 2 nJ/pulse and the direct writing speed varies Accepted 8 November 2015 from 10 to 25 mm/s, the near sub-wavelength ripples (NSRs) with orientation perpendicular to the laser Available online 14 November 2015 polarization are generated. While the direct writing speed reaches 30 mm/s, the direction of the obtained deep sub-wavelength ripples (DSRs) suddenly changes and becomes parallel to the laser polarization, Keywords: rarely reported so far for femtosecond laser irradiation of silicon. Meanwhile, we extend the Sipe–Drude Laser-induced periodic surface structures interference theory by considering the thermal excitation, and numerically calculate the efficacy factor (LIPSSs) for silicon irradiated by femtosecond laser pulses. The revised Sipe–Drude interference theoretical results Near sub-wavelength ripples Deep sub-wavelength ripples show good agreement with the periods and orientations of sub-wavelength ripples.

Journal

Applied Surface ScienceElsevier

Published: Jan 1, 2016

References

You’re reading a free preview. Subscribe to read the entire article.


DeepDyve is your
personal research library

It’s your single place to instantly
discover and read the research
that matters to you.

Enjoy affordable access to
over 18 million articles from more than
15,000 peer-reviewed journals.

All for just $49/month

Explore the DeepDyve Library

Search

Query the DeepDyve database, plus search all of PubMed and Google Scholar seamlessly

Organize

Save any article or search result from DeepDyve, PubMed, and Google Scholar... all in one place.

Access

Get unlimited, online access to over 18 million full-text articles from more than 15,000 scientific journals.

Your journals are on DeepDyve

Read from thousands of the leading scholarly journals from SpringerNature, Elsevier, Wiley-Blackwell, Oxford University Press and more.

All the latest content is available, no embargo periods.

See the journals in your area

DeepDyve

Freelancer

DeepDyve

Pro

Price

FREE

$49/month
$360/year

Save searches from
Google Scholar,
PubMed

Create lists to
organize your research

Export lists, citations

Read DeepDyve articles

Abstract access only

Unlimited access to over
18 million full-text articles

Print

20 pages / month

PDF Discount

20% off