Depth elemental characterization of 1D self-aligned TiO2 nanotubes using calibrated radio frequency glow discharge optical emission spectroscopy (GDOES)

Depth elemental characterization of 1D self-aligned TiO2 nanotubes using calibrated radio... Applied Surface Science 442 (2018) 412–416 Contents lists available at ScienceDirect Applied Surface Science journal homepage: www.elsevier.com/locate/apsusc Full Length Article Depth elemental characterization of 1D self-aligned TiO nanotubes using calibrated radio frequency glow discharge optical emission spectroscopy (GDOES) a a a b b a Shiva Mohajernia , Anca Mazare , Imgon Hwang , Sofia Gaiaschi , Patrick Chapon , Helga Hildebrand , a,⇑ Patrik Schmuki Department of Materials Science, WW4-LKO, University of Erlangen-Nuremberg, Erlangen, Germany HORIBA FRANCE SAS Avenue de la Vauve – Passage Jobin Yvon, Palaiseau, France ar ti c l e i nf o ab stra ct Article history: In this work we study the depth composition of anodic TiO nanotube layers. We use elemental depth Received 8 January 2018 profiling with Glow Discharge Optical Emission Spectroscopy and calibrate the results of this technique Revised 13 February 2018 with X-ray photoelectron spectroscopy (XPS) and energy dispersive spectroscopy (EDS). We establish Accepted 19 February 2018 optimized sputtering conditions for nanotubular structures using the pulsed RF mode, which causes min- Available online 20 February 2018 imized structural damage during the depth profiling of the nanotubular structures. This allows to obtain calibrated sputter rates that account for the nanotubular ‘‘porous” http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Precambrian Research Elsevier

Depth elemental characterization of 1D self-aligned TiO2 nanotubes using calibrated radio frequency glow discharge optical emission spectroscopy (GDOES)

Loading next page...
 
/lp/elsevier/depth-elemental-characterization-of-1d-self-aligned-tio2-nanotubes-nlWXkEyhLQ
Publisher
Elsevier
Copyright
Copyright © 2018 Elsevier B.V.
ISSN
0301-9268
eISSN
1872-7433
D.O.I.
10.1016/j.apsusc.2018.02.185
Publisher site
See Article on Publisher Site

Abstract

Applied Surface Science 442 (2018) 412–416 Contents lists available at ScienceDirect Applied Surface Science journal homepage: www.elsevier.com/locate/apsusc Full Length Article Depth elemental characterization of 1D self-aligned TiO nanotubes using calibrated radio frequency glow discharge optical emission spectroscopy (GDOES) a a a b b a Shiva Mohajernia , Anca Mazare , Imgon Hwang , Sofia Gaiaschi , Patrick Chapon , Helga Hildebrand , a,⇑ Patrik Schmuki Department of Materials Science, WW4-LKO, University of Erlangen-Nuremberg, Erlangen, Germany HORIBA FRANCE SAS Avenue de la Vauve – Passage Jobin Yvon, Palaiseau, France ar ti c l e i nf o ab stra ct Article history: In this work we study the depth composition of anodic TiO nanotube layers. We use elemental depth Received 8 January 2018 profiling with Glow Discharge Optical Emission Spectroscopy and calibrate the results of this technique Revised 13 February 2018 with X-ray photoelectron spectroscopy (XPS) and energy dispersive spectroscopy (EDS). We establish Accepted 19 February 2018 optimized sputtering conditions for nanotubular structures using the pulsed RF mode, which causes min- Available online 20 February 2018 imized structural damage during the depth profiling of the nanotubular structures. This allows to obtain calibrated sputter rates that account for the nanotubular ‘‘porous”

Journal

Precambrian ResearchElsevier

Published: May 1, 2018

References

You’re reading a free preview. Subscribe to read the entire article.


DeepDyve is your
personal research library

It’s your single place to instantly
discover and read the research
that matters to you.

Enjoy affordable access to
over 12 million articles from more than
10,000 peer-reviewed journals.

All for just $49/month

Explore the DeepDyve Library

Unlimited reading

Read as many articles as you need. Full articles with original layout, charts and figures. Read online, from anywhere.

Stay up to date

Keep up with your field with Personalized Recommendations and Follow Journals to get automatic updates.

Organize your research

It’s easy to organize your research with our built-in tools.

Your journals are on DeepDyve

Read from thousands of the leading scholarly journals from SpringerNature, Elsevier, Wiley-Blackwell, Oxford University Press and more.

All the latest content is available, no embargo periods.

See the journals in your area

Monthly Plan

  • Read unlimited articles
  • Personalized recommendations
  • No expiration
  • Print 20 pages per month
  • 20% off on PDF purchases
  • Organize your research
  • Get updates on your journals and topic searches

$49/month

Start Free Trial

14-day Free Trial

Best Deal — 39% off

Annual Plan

  • All the features of the Professional Plan, but for 39% off!
  • Billed annually
  • No expiration
  • For the normal price of 10 articles elsewhere, you get one full year of unlimited access to articles.

$588

$360/year

billed annually
Start Free Trial

14-day Free Trial