Applied Surface Science 442 (2018) 412–416 Contents lists available at ScienceDirect Applied Surface Science journal homepage: www.elsevier.com/locate/apsusc Full Length Article Depth elemental characterization of 1D self-aligned TiO nanotubes using calibrated radio frequency glow discharge optical emission spectroscopy (GDOES) a a a b b a Shiva Mohajernia , Anca Mazare , Imgon Hwang , Soﬁa Gaiaschi , Patrick Chapon , Helga Hildebrand , a,⇑ Patrik Schmuki Department of Materials Science, WW4-LKO, University of Erlangen-Nuremberg, Erlangen, Germany HORIBA FRANCE SAS Avenue de la Vauve – Passage Jobin Yvon, Palaiseau, France ar ti c l e i nf o ab stra ct Article history: In this work we study the depth composition of anodic TiO nanotube layers. We use elemental depth Received 8 January 2018 proﬁling with Glow Discharge Optical Emission Spectroscopy and calibrate the results of this technique Revised 13 February 2018 with X-ray photoelectron spectroscopy (XPS) and energy dispersive spectroscopy (EDS). We establish Accepted 19 February 2018 optimized sputtering conditions for nanotubular structures using the pulsed RF mode, which causes min- Available online 20 February 2018 imized structural damage during the depth proﬁling of the nanotubular structures. This allows to obtain calibrated sputter rates that account for the nanotubular ‘‘porous”
Precambrian Research – Elsevier
Published: May 1, 2018
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