A micro corona motor

A micro corona motor A micro corona motor was fabricated and tested. Intense electric fields at sharp stator electrodes ionize air molecules, and ionized charges are transferred onto the rotor surface. Coulomb repulsion between rotor and electrodes rotates and levitates the rotor. Important design parameters, such as electrode spacing, air gap, and electrode-tilt angle, were studied using an electrostatic field simulator. For good performance, the stator's electrodes should be axially thick and have sharp tips. Therefore, X-ray lithography was adopted for precise, high aspect ratio characteristics. To avoid the fabrication difficulty of a membrane X-ray mask, a built-on X-ray mask technique was employed with negative-toned SU-8 photoresist. Speed and torque of a fabricated micro motor were measured. High rotating speed (>10 4 rpm) was obtained with several hundred DC volts applied. Using the spin-down method, the torque was estimated in the order of 10 nN m. For over 20 million cycles, the motor showed good stability with no additional control action. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Sensors and Actuators A: Physical Elsevier

Loading next page...
 
/lp/elsevier/a-micro-corona-motor-M6Y6XJGLDE
Publisher
Elsevier
Copyright
Copyright © 2004 Elsevier B.V.
ISSN
0924-4247
eISSN
1873-3069
D.O.I.
10.1016/j.sna.2004.08.017
Publisher site
See Article on Publisher Site

Abstract

A micro corona motor was fabricated and tested. Intense electric fields at sharp stator electrodes ionize air molecules, and ionized charges are transferred onto the rotor surface. Coulomb repulsion between rotor and electrodes rotates and levitates the rotor. Important design parameters, such as electrode spacing, air gap, and electrode-tilt angle, were studied using an electrostatic field simulator. For good performance, the stator's electrodes should be axially thick and have sharp tips. Therefore, X-ray lithography was adopted for precise, high aspect ratio characteristics. To avoid the fabrication difficulty of a membrane X-ray mask, a built-on X-ray mask technique was employed with negative-toned SU-8 photoresist. Speed and torque of a fabricated micro motor were measured. High rotating speed (>10 4 rpm) was obtained with several hundred DC volts applied. Using the spin-down method, the torque was estimated in the order of 10 nN m. For over 20 million cycles, the motor showed good stability with no additional control action.

Journal

Sensors and Actuators A: PhysicalElsevier

Published: Feb 28, 2005

References

You’re reading a free preview. Subscribe to read the entire article.


DeepDyve is your
personal research library

It’s your single place to instantly
discover and read the research
that matters to you.

Enjoy affordable access to
over 18 million articles from more than
15,000 peer-reviewed journals.

All for just $49/month

Explore the DeepDyve Library

Search

Query the DeepDyve database, plus search all of PubMed and Google Scholar seamlessly

Organize

Save any article or search result from DeepDyve, PubMed, and Google Scholar... all in one place.

Access

Get unlimited, online access to over 18 million full-text articles from more than 15,000 scientific journals.

Your journals are on DeepDyve

Read from thousands of the leading scholarly journals from SpringerNature, Elsevier, Wiley-Blackwell, Oxford University Press and more.

All the latest content is available, no embargo periods.

See the journals in your area

DeepDyve

Freelancer

DeepDyve

Pro

Price

FREE

$49/month
$360/year

Save searches from
Google Scholar,
PubMed

Create lists to
organize your research

Export lists, citations

Read DeepDyve articles

Abstract access only

Unlimited access to over
18 million full-text articles

Print

20 pages / month

PDF Discount

20% off