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- Publisher
- Springer Journals
- Copyright
- Copyright © 2005 by Springer-Verlag
- Subject
- Physics; Condensed Matter Physics; Optical and Electronic Materials; Nanotechnology; Characterization and Evaluation of Materials; Surfaces and Interfaces, Thin Films; Operating Procedures, Materials Treatment
- ISSN
- 0947-8396
- eISSN
- 1432-0630
- DOI
- 10.1007/s00339-005-3275-4
- Publisher site
- See Article on Publisher Site
Abstract
We present ablation results of silicon obtained by simultaneous irradiation of the sample with the fundamental beam of a picosecond-neodymium-vanadate (Nd:VAN) laser (1064 nm, 10 ps pulse duration) and a small amount of second harmonic (SH) produced in a thin nonlinear crystal. In this fashion, the ablation yield could be increased by 70%. In addition, the ablation quality was improved in terms of surface smoothness. The underlying mechanism can be attributed to a ‘seeding’ of the target area with free carriers by the 532 nm radiation.
Journal
Applied Physics A: Materials Science Processing – Springer Journals
Published: Sep 1, 2005