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Double-reflection confocal probe for surface profiling microscopy with improved axial resolution

Double-reflection confocal probe for surface profiling microscopy with improved axial resolution A double-reflection confocal probe technique for surface profiling microscopy is presented. By delivering a small collimated laser beam at an off-axis position into a microscope objective to allow retro-reflection on the first reflected beam from the surface under test, second reflection at the same point of the test surface can be established. The feasibility of this technique is experimental investigated. This approach improves the axial resolution by a factor of two as compared to that of the conventional single-reflection system. Simulation is performed to estimate and evaluate the lateral scanning performance of the double-reflection system. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Proceedings of SPIE SPIE

Double-reflection confocal probe for surface profiling microscopy with improved axial resolution

Proceedings of SPIE , Volume 12607 – Sep 20, 2023

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References (13)

Publisher
SPIE
Copyright
COPYRIGHT SPIE. Downloading of the abstract is permitted for personal use only.
ISSN
0277-786X
eISSN
1996-756X
DOI
10.1117/12.3005555
Publisher site
See Article on Publisher Site

Abstract

A double-reflection confocal probe technique for surface profiling microscopy is presented. By delivering a small collimated laser beam at an off-axis position into a microscope objective to allow retro-reflection on the first reflected beam from the surface under test, second reflection at the same point of the test surface can be established. The feasibility of this technique is experimental investigated. This approach improves the axial resolution by a factor of two as compared to that of the conventional single-reflection system. Simulation is performed to estimate and evaluate the lateral scanning performance of the double-reflection system.

Journal

Proceedings of SPIESPIE

Published: Sep 20, 2023

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