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Synergetic surface modification effect of argon and oxygen for diamond films by MPCVD

Synergetic surface modification effect of argon and oxygen for diamond films by MPCVD Abstract Diamond films were synthesized in a CH 4 -H 2 system with good surface quality by adjusting the additive amount of argon and oxygen gas. The diamond phase content and surface roughness of samples are 86.1% and 81.5 nm, respectively. The results indicate that only Ar addition will decrease the purity of diamond films, whereas Ar-O 2 mixed gas can further increase the diamond phase content. It is worth noting that the content of diamond phase has no significant increase when O 2 flow exceed 1 sccm. The surface roughness reduced from 199.8 to 81.5 nm by the addition of 14 sccm Ar and 1 sccm O 2 , and the surface quality will be deteriorated in case of further increasing O 2 or decreasing Ar concentration. Meanwhile, the growth rate under different conditions and the synergetic surface modification effect of Ar-O 2 mixed gas for diamond films growth process were discussed. http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Green Processing and Synthesis de Gruyter

Synergetic surface modification effect of argon and oxygen for diamond films by MPCVD

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Publisher
de Gruyter
Copyright
Copyright © 2016 by the
ISSN
2191-9542
eISSN
2191-9550
DOI
10.1515/gps-2015-0135
Publisher site
See Article on Publisher Site

Abstract

Abstract Diamond films were synthesized in a CH 4 -H 2 system with good surface quality by adjusting the additive amount of argon and oxygen gas. The diamond phase content and surface roughness of samples are 86.1% and 81.5 nm, respectively. The results indicate that only Ar addition will decrease the purity of diamond films, whereas Ar-O 2 mixed gas can further increase the diamond phase content. It is worth noting that the content of diamond phase has no significant increase when O 2 flow exceed 1 sccm. The surface roughness reduced from 199.8 to 81.5 nm by the addition of 14 sccm Ar and 1 sccm O 2 , and the surface quality will be deteriorated in case of further increasing O 2 or decreasing Ar concentration. Meanwhile, the growth rate under different conditions and the synergetic surface modification effect of Ar-O 2 mixed gas for diamond films growth process were discussed.

Journal

Green Processing and Synthesisde Gruyter

Published: Jun 1, 2016

References