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/lp/de-gruyter/synergetic-surface-modification-effect-of-argon-and-oxygen-for-diamond-y2IoO9N4Aa
- Publisher
- de Gruyter
- Copyright
- Copyright © 2016 by the
- ISSN
- 2191-9542
- eISSN
- 2191-9550
- DOI
- 10.1515/gps-2015-0135
- Publisher site
- See Article on Publisher Site
Abstract
Abstract Diamond films were synthesized in a CH 4 -H 2 system with good surface quality by adjusting the additive amount of argon and oxygen gas. The diamond phase content and surface roughness of samples are 86.1% and 81.5 nm, respectively. The results indicate that only Ar addition will decrease the purity of diamond films, whereas Ar-O 2 mixed gas can further increase the diamond phase content. It is worth noting that the content of diamond phase has no significant increase when O 2 flow exceed 1 sccm. The surface roughness reduced from 199.8 to 81.5 nm by the addition of 14 sccm Ar and 1 sccm O 2 , and the surface quality will be deteriorated in case of further increasing O 2 or decreasing Ar concentration. Meanwhile, the growth rate under different conditions and the synergetic surface modification effect of Ar-O 2 mixed gas for diamond films growth process were discussed.
Journal
Green Processing and Synthesis – de Gruyter
Published: Jun 1, 2016