Access the full text.
Sign up today, get DeepDyve free for 14 days.
Loading next page...
/lp/de-gruyter/mems-optical-switch-switching-time-reduction-bYNLH0Y3Yl
References (69)
-
I. Plander, M. Štepanovský (2012)
Gas-damped double-gimbaled electrostatic torsional micromirror modeling and simulationSimul. Model. Pract. Theory, 20
-
Sane (2004)
Modified sliding mode control and its application to electrostatically controlled dualaxis micromirrors Proceedings of the American Control Boston MAConference USA IEEE, 33
-
Pu (2004)
Ch Electrostatic actuation of three - dimensional MEMS mirrors using sidewall electrodes of Selected Topics in QuantumIEEE Journal Electronics, 32
-
Xiaohua Ma (2003)
Optical switching technology comparison optical MEMS vs other technologies CommunicationIEEE Magazine, 41
-
Xiaohua Ma, G. Kuo (2003)
Optical switching technology comparison: optical MEMS vs. other technologiesIEEE Commun. Mag., 41
-
J. Basilio, S. Matos (2002)
Design of PI and PID controllers with transient performance specificationIEEE Trans. Educ., 45
-
Fernandez (2004)
Modular MEMS design and fabrication for an transparent optical cross - connect switch In ed Proceedings of the SPIE Bellingham WA Optomechatronic Micro Components Devices and SystemsUSA Nano, 80
-
J. Bronson, G. Wiens (2006)
Control of Micro Mirrors for High Precision Performance -
Lih (2002)
Opportunities and Challenges for MEMS in Lightwave Communications of Sellected Topics in QuantumIEEE Journal Electronics, 8
-
D. Bishop, C. Giles, G. Austin (2002)
The Lucent LambdaRouter: MEMS technology of the future here todayIEEE Commun. Mag., 40
-
(2002)
238x238 Surface Micromachoned Optical Crossconnect with 2dB Maximum Loss, Proceedings of the Optical Fiber Communications Conference OFC -
Aksyuk (2002)
Surface Micromachoned Optical Crossconnect with dB Maximum Loss Proceedings of the Optical Fiber Communications Conference OFC Anaheim CA Trends in Optics and Photonics ( Optical Society of AmericaUSA OSA, 21
-
Lih Lin, E. Goldstein (2002)
Opportunities and challenges for MEMS in lightwave communicationsIEEE Journal of Selected Topics in Quantum Electronics, 8
-
I. Plander, M. Štepanovský (2015)
Decoupling of two-axis electrostatically-actuated 3D MEMS mirror2015 IEEE 13th International Scientific Conference on Informatics
-
S. Mechels, L. Muller, G. Morley, D. Tillett (2003)
1D MEMS-based wavelength switching subsystemIEEE Commun. Mag., 41
-
Mizukami (2009)
- MEMS optical switch module with simultaneous optical paths connection for optical crossconnect systems Proceedings of the International Conference on Photonics in Switching Tirrenia PisaItaly IEEE Xplore, 37
-
Plander (2012)
Gas - damped double - gimbaled electrostatic torsional micromirror modeling and simulation Simulation Modelling Practice andTheory, 20
-
T. Kudrle, G. Shedd, C.C. Wang, J. Hsiao, M. Bancu, G. Kirkos, N. Yazdi, M. Waelti, H. Sane, C. Mastrangelo (2003)
Pull-in suppression and torque magnification in parallel plate electrostatic actuators with side electrodesTRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664), 1
-
Dickson (2004)
DMEMS switch control systemwith robustness toMEMS resonant frequency variation and pointing drift Proceedings of the Optical Fiber Communication Conference Los Angeles California Technical Digest ( Optical Society of AmericaUSA, 27
-
(2004)
MEMSswitch control systemwith robustness toMEMS resonant MEMS optical switch: Switching time reduction | 125 frequency variation and pointing drift -
Sangyoon Han (2015)
Large-Scale Silicon Photonic MEMS Switch -
H. Sane, N. Yazdi, C. Mastrangelo (2004)
Modified sliding mode control and its application to electrostatically controlled dual-axis micromirrorsProceedings of the 2004 American Control Conference, 3
-
T. Kudrle, C. Wang, M. Bancu, J. Hsiao, A. Pareek, M. Waelti, G. Kirkos, T. Shone, C. Fung, C. Mastrangelo (2005)
Single-crystal silicon micromirror array with polysilicon flexuresSensors and Actuators A-physical, 119
-
R. Syms (2002)
Scaling laws for MEMS mirror-rotation optical cross connect switchesJournal of Lightwave Technology, 20
-
Kawajiri (2012)
Port MEMS Optical Switch Module with Toroidal Concave Mirror NTT TechnicalReview, 10
-
Juneau (2003)
Dual - axis optical mirror positioning using a nonlinear closedloop controller Proceedings of th International Conference on Solid State Sensors Actuators and Boston MAMicrosystems USA IEEE, 29
-
Plander (2015)
Decoupling of two - axis electrostatically - actuated MEMS mirror Proceedings of Scientific Conference on Informatics th PopradIEEE International Slovakia IEEE, 13
-
Kudrle (2003)
Pull - in Suppression and TorqueMagnification in Parallel Plate Electrostatic Actuators with Side Electrodes Proceedings of th International Conference on Solid State Sensors Actuators and Boston MAMicrosystems USA IEEE, 31
-
(2012)
512x512 Port 3D MEMS Optical Switch Module with Toroidal Concave Mirror -
Cheng-hua Tsai, J. Tsai (2015)
MEMS optical switches and interconnectsDisplays, 37
-
J. Kim, C. Nuzman, B. Kumar, D. Lieuwen, J. Kraus, A. Weiss, C. Lichtenwalner, A. Papazian, R. Frahm, N. Basavanhally, D. Ramsey, V. Aksyuk, F. Pardo, M. Simon, V. Lifton, H. Chan, M. Haueis, A. Gasparyan, H. Shea, S. Arney, C. Bolle, P. Kolodner, R. Ryf, D. Neilson, J. Gates (2003)
1100 x 1100 port MEMS-based optical crossconnect with 4-dB maximum lossIEEE Photonics Technology Letters, 15
-
P. Chu, I. Brener, C. Pu, Shi-Sheng Lee, J. Dadap, Sangtae Park, K. Bergman, N. Bonadeo, T. Chau, M. Chou, R. Doran, R. Gibson, R. Harel, J. Johnson, C. Lee, D. Peale, B. Tang, D. Tong, M. Tsai, Qi Wu, W. Zhong, E. Goldstein, Lih Lin, J. Walker (2005)
Design and nonlinear servo control of MEMS mirrors and their performance in a large port-count optical switchJournal of Microelectromechanical Systems, 14
-
(2004)
MEMSswitch control systemwith robustness toMEMS resonant Unauthenticated Download Date | 6/8/19 9:02 PM MEMS optical switch: Switching time reduction | 125 frequency variation and pointing drift -
I. Plander, M. Štepanovský (2016)
Advanced three-dimensional MEMS photonic cross-connect switch for nonblocking all-optical networksOpt. Switch. Netw., 22
-
Fiorani (2013)
Large data center interconnects employing hybrid optical switching Procceding of th European Conference on Network and Optical Graz CommunicationCommunications Austria IEEE Magazine, 1
-
Yi Zhao, F. Tay, Guangya Zhou, F. Chau (2006)
A study of electrostatic spring softening for dual-axis micromirrorOptik, 117
-
Zhixiong Xiao, W. Peng, Xingtao Wu, K. Farmer (2002)
Pull-in study for round double-gimbaled electrostatic torsion actuatorsJournal of Micromechanics and Microengineering, 12
-
Andres Fernandez, B. Staker, W. Owens, L. Muray, J. Spallas, W. Banyai (2004)
Modular MEMS design and fabrication for an 80 x 80 transparent optical cross-connect switch, 5604
-
Napoli (2005)
A Novel Sensing Scheme for the Displacement of Electrostatically Actuated Microcantilevers Proceedings of American Control Portland ORConference USA, 28
-
Bowers (2014)
Advantages and Control of Hybrid Packet Optical - Circuit - Switched Data Center Networks Proceedings of Photonics in Switching San Diego CA Advanced Photonics for CommunicationsUSA, 13
-
S. Aleksic (2013)
Energy-efficient communication networks for improved global energy productivityTelecommunication Systems, 54
-
T. Juneau, K. Unterkofler, T. Seliverstov, S. Zhang, M. Judy (2003)
Dual-axis optical mirror positioning using a nonlinear closed-loop controllerTRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664), 1
-
N. Madamopoulos, V. Kaman, S. Yuan, O. Jerphagnon, R. Helkey, J. Bowers (2010)
Applications of large-scale optical 3D-MEMS switches in fiber-based broadband-access networksPhotonic Network Communications, 19
-
Xiaohua Ma, G. Kuo (2004)
A novel integrated multistage optical MEMS-mirror switch architecture design with shuffle Benes inter-stage connecting principleOptics Communications, 242
-
Syms (2002)
Scaling laws for MEMS mirror - rotation optical cross connect switches Lightwave TechnologyJournal, 20
-
Bronson (2006)
Control of Micro Mirrors for High Precision Performance Proceedings of the Florida Conference on Recent Advances in Robotics Miami FLUSA, 25
-
Yamaguchi (2007)
High - yield Fabrication Methods for MEMS Tilt Mirror Array for Optical Switches NTT TechnicalReview, 5
-
C. Pu, Sangtae Park, P. Chu, Shi-Sheng Lee, M. Tsai, David Peale, Nico Bonadeo, I. Brener (2004)
Electrostatic actuation of three-dimensional MEMS mirrors using sidewall electrodesIEEE Journal of Selected Topics in Quantum Electronics, 10
-
M. Napoli, C. Olroyd, Bassam Bamieh, K. Turner (2005)
A novel sensing scheme for the displacement of electrostatically actuated microcantileversProceedings of the 2005, American Control Conference, 2005.
-
Xuming Zhang, F. Chau, C. Quan, Y. Lam, A. Liu (2001)
A STUDY OF THE STATIC CHARACTERISTICS OF A TORSIONAL MICROMIRRORSensors and Actuators A-physical, 90
-
J. Wilson, R. Brown, D. Cherek, J. Dailey, B. Hilman, P. Jobe, B. Manno, J. Manno, H. Redetzki, J. Stewart (1980)
Drug excretion in human breast milk: principles, pharmacokinetics and projected consequences.Clinical pharmacokinetics, 5 1
-
Hui Chen, M. Pallapa, Weijie Sun, Zhendong Sun, J. Yeow (2012)
Second-order sliding mode control of a 2D torsional MEMS micromirror with sidewall electrodesJournal of Micromechanics and Microengineering, 23
-
Kim (2003)
Port MEMS - Based Optical Crossconnect With - dB Maximum Loss TechnologyIEEE Photonics Letters, 20
-
Yamamoto (2003)
Development of a Large - scale MEMS Optical Switch Module NTT TechnicalReview, 1
-
(2007)
High-yield Fabrication Methods for MEMS Tilt Mirror Array for Optical Switches -
J. Bowers, A. Raza, Daniel Tardent, Jitender Miglani (2014)
Advantages and Control of Hybrid Packet Optical-Circuit-Switched Data Center Networks -
Masato Mizukami, J. Yamaguchi, N. Nemoto, Y. Kawajiri, H. Hirata, Shingo Uchiyama, M. Makihara, Tomomi Sakata, Nobuhiro Shimoyama, Hiromu Ishii, Fusao Shimokawa (2009)
128×128 3D-MEMS optical switch module with simultaneous optical paths connection for optical cross-connect systems2009 International Conference on Photonics in Switching
-
M. Fiorani, M. Casoni, S. Aleksic (2013)
Large data center interconnects employing hybrid optical switchingProceedings of the 2013 18th European Conference on Network and Optical Communications & 2013 8th Conference on Optical Cabling and Infrastructure (NOC-OC&I)
-
Yahong Yao, Xiaoping Zhang, Gaofeng Wang, Liji Huang (2005)
Efficient modeling of a biaxial micromirror with decoupled mechanismSensors and Actuators A-physical, 120
-
Sangyoon Han (2015)
Large - Scale Silicon Photonic MEMS Switch Technical Report No EECS and Computer Sciences University of California at BerkeleyElectrical Engineering USA, 42
-
Chen (2013)
Second - order sliding mode control of a torsional MEMS micromirror with sidewall electrodes of Micromechanics andJournal Microengineering, 23
-
Xiaohua (2004)
Ma Geng Sheng Kuo A novel integrated multistage optical MEMS - mirror switch architecture design with shuffle Benes inter - stage connecting principleOptics Communications
-
M. Dokmeci, A. Pareek, S. Bakshi, M. Waelti, C. Fung, Khee Heng, C. Mastrangelo (2004)
Two-axis single-crystal silicon micromirror arraysJournal of Microelectromechanical Systems, 13
-
Kawai (2006)
Optical Components and Devices for Next - Generation Networks Fujitsu Science TechnologyJournal, 22
-
(2004)
MEMSswitch control systemwith robustness toMEMS resonant Unauthenticated Download Date | 5/25/19 1:30 PM MEMS optical switch: Switching time reduction | 125 frequency variation and pointing drift -
Y. Uenishi, R. Sawada, J. Yamaguchi, Tsuyoshi Yamamoto (2002)
Development of the core technologies for large-scale 3D-MEMS optical switchesNTT R and D, 51
-
J. Zhao, Hualing Chen, J. Huang, A. Liu (2005)
A study of dynamic characteristics and simulation of MEMS torsional micromirrorsSensors and Actuators A-physical, 120
-
64x64 3D-MEMS switch control system with robustness to MEMS resonant frequency variation and pointing drift -
V. Masaaki, Kawai Kazuyuki, M. Yamamoto, V. Osamu, Tsuboi Kazuhiro, Tanaka Tsuyoshi, Yamamoto Morito, V. Ippei, Sawaki Sugawara (2006)
Optical components and devices for next-generation photonic networksFujitsu Scientific & Technical Journal, 42
- Publisher
- de Gruyter
- Copyright
- © 2016 I. Plander and M. Stepanovsky
- eISSN
- 2299-1093
- DOI
- 10.1515/comp-2016-0010
- Publisher site
- See Article on Publisher Site
Abstract
AbstractExisting 3D MEMS-based optical switches offergood optical properties (low insertion loss, lowcrosstalk), high reliability and low power consumption.These switches utilize highly reflective micro-mirrors tomanipulate an optical signal inside the switch directlywithout any conversions. They are used to build dynamicallyreconfigurable, highly-scalable physical optical networklayer. As indicated by the simulation results of thispaper, many of existing micro-mirror designs do not havetheir dynamic characteristics well optimized and this limitsthe switching speed of the optical switch. In a 3DMEMSswitch, the coupling between the mechanical structure(micro-mirror) and electrostatic field (electrodes) resultsin dynamic coupled rotation of the micro-mirror about itsaxes, known as the cross-axis coupling effect. The couplingnature of micro-mirror rotation makes its control difficult.In this paper,we present the simulation case studiesand a simple optimization technique leading to decoupledrotation of the micro-mirror about two perpendicular axes.This helps to reduce the switching time of the switch whilekeeping the same manufacturing process and only minimaldesign changes.
Journal
Open Computer Science – de Gruyter
Published: Jan 1, 2016