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The influence of sputter deposition parameters on piezoelectric and mechanical properties of AlN thin films

The influence of sputter deposition parameters on piezoelectric and mechanical properties of AlN... http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Materials Science and Engineering: B CrossRef

The influence of sputter deposition parameters on piezoelectric and mechanical properties of AlN thin films

Materials Science and Engineering: B , Volume 172 (3): 253-258 – Sep 1, 2010
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Publisher
CrossRef
ISSN
0921-5107
DOI
10.1016/j.mseb.2010.05.026
Publisher site
See Article on Publisher Site

Abstract

Journal

Materials Science and Engineering: BCrossRef

Published: Sep 1, 2010

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