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Spin Coating Study for Thick Layers with High Viscosity Polyimide

Spin Coating Study for Thick Layers with High Viscosity Polyimide http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png Microelectronics International CrossRef

Spin Coating Study for Thick Layers with High Viscosity Polyimide

Borsetto, M.; Carcano, G.; Ceriani, M.
Microelectronics International , Volume 13 (3): 30-32 – Dec 1, 1996
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Spin Coating Study for Thick Layers with High Viscosity Polyimide

Borsetto, M.; Carcano, G.; Ceriani, M.
Microelectronics International , Volume 13 (3): 30-32 – Dec 1, 1996

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Publisher
CrossRef
ISSN
1356-5362
DOI
10.1108/13565369610800377
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Abstract

Journal

Microelectronics International – CrossRef

Published: Dec 1, 1996

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