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Simulation tool for design and management optimization of automated interbay material handling and storage systems for large wafer fab

Simulation tool for design and management optimization of automated interbay material handling... http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png IEEE Transactions on Semiconductor Manufacturing CrossRef

Simulation tool for design and management optimization of automated interbay material handling and storage systems for large wafer fab

IEEE Transactions on Semiconductor Manufacturing , Volume 8 (1): 44-49 – Jan 1, 1995

Simulation tool for design and management optimization of automated interbay material handling and storage systems for large wafer fab

IEEE Transactions on Semiconductor Manufacturing , Volume 8 (1): 44-49 – Jan 1, 1995

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Publisher
CrossRef
ISSN
0894-6507
DOI
10.1109/66.350756
Publisher site
See Article on Publisher Site

Abstract

Journal

IEEE Transactions on Semiconductor ManufacturingCrossRef

Published: Jan 1, 1995

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