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Alternative facility layouts for semiconductor wafer fabrication facilities

Alternative facility layouts for semiconductor wafer fabrication facilities http://www.deepdyve.com/assets/images/DeepDyve-Logo-lg.png IEEE Transactions on Components, Packaging, and Manufacturing Technology: Part C CrossRef

Alternative facility layouts for semiconductor wafer fabrication facilities

IEEE Transactions on Components, Packaging, and Manufacturing Technology: Part C , Volume 20 (2): 152-163 – Apr 1, 1997

Alternative facility layouts for semiconductor wafer fabrication facilities

IEEE Transactions on Components, Packaging, and Manufacturing Technology: Part C , Volume 20 (2): 152-163 – Apr 1, 1997

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Publisher
CrossRef
ISSN
1083-4400
DOI
10.1109/3476.622885
Publisher site
See Article on Publisher Site

Abstract

Journal

IEEE Transactions on Components, Packaging, and Manufacturing Technology: Part CCrossRef

Published: Apr 1, 1997

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