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References (75)
-
W. Ashurst, Christina Yau, C. Carraro, Christina Lee, G. Kluth, R. Howe, R. Maboudian (2001)
Alkene Based Monolayer Films As Anti Stiction Coatings For Polysilicon MEMSSensors and Actuators A-physical, 91
-
W. Ashurst, Christina Yau, C. Carraro, R. Maboudian, M. Dugger (2001)
Dichlorodimethylsilane as an anti-stiction monolayer for MEMS: a comparison to the octadecyltrichlorosilane self-assembled monolayerIEEE\/ASME Journal of Microelectromechanical Systems, 10
-
T. Yu-Chong, R. Muller (1990)
Frictional study of IC-processed micromotorsSensors and Actuators A-physical, 21
-
S. Pang (2001)
High-Aspect-Ratio Structures for MEMSMRS Bulletin, 26
-
A. Ulman (1991)
Ultrathin organic films: From Langmuir-Blodgett to self assembly, 11
-
R. Maboudian, W. Ashurst, C. Carraro (2000)
Self-assembled monolayers as anti-stiction coatings for MEMS: characteristics and recent developmentsSensors and Actuators A-physical, 82
-
M. Boer, T. Mayer (2001)
Tribology of MEMSMRS Bulletin, 26
-
D. Senft, M. Dugger (1997)
Friction and wear in surface-micromachined tribological test devices, 3224
-
K. Deng, R. Collins, M. Mehregany, C. Sukenik (1995)
Performance impact of monolayer coating of polysilicon micromotorsProceedings IEEE Micro Electro Mechanical Systems. 1995
-
R. Maboudian, R. Howe (1997)
Critical Review: Adhesion in surface micromechanical structuresJournal of Vacuum Science & Technology B, 15
-
C. Mastrangelo, G. Saloka (1993)
A dry-release method based on polymer columns for microstructure fabrication[1993] Proceedings IEEE Micro Electro Mechanical Systems
-
U. Srinivasan, M. Houston, R. Howe, R. Maboudian (1998)
Alkyltrichlorosilane-based self-assembled monolayer films for stiction reduction in silicon micromachinesIEEE\/ASME Journal of Microelectromechanical Systems, 7
-
K. Lee, K. Yu, Y. Kim (1997)
Heteroepitaxial growth of 3C-SiC on Si(0 0 1) without carbonizationJournal of Crystal Growth, 179
-
Bradley Smith, J. Sniegowski, G. LaVigne, Craig Brown (1996)
Thin Teflon-like films for eliminating adhesion in released polysilicon microstructuresProceedings of International Solid State Sensors and Actuators Conference (Transducers '97), 1
-
P. Mazur, A. Maradudin (1981)
Effects of surface roughness on the van der Waals force between macroscopic bodies. II. Two rough surfacesPhysical Review B, 23
-
W. Ashurst, C. Carraro, R. Maboudian, W. Frey (2003)
Wafer level anti-stiction coatings for MEMSSensors and Actuators A-physical, 104
-
A. Ayón, R. Braff, C. Lin, H. Sawin, M. Schmidt (1999)
Characterization of a Time Multiplexed Inductively Coupled Plasma EtcherJournal of The Electrochemical Society, 146
-
J. Hruby (2001)
LIGA Technologies and ApplicationsMRS Bulletin, 26
-
C. Mastrangelo, C. Hsu (1992)
A simple experimental technique for the measurement of the work of adhesion of microstructuresTechnical Digest IEEE Solid-State Sensor and Actuator Workshop
-
L. Hornbeck (2001)
The DMD^TM Projection Display Chip: A MEMS-Based TechnologyMRS Bulletin, 26
-
B. Bhushan, J. Israelachvili, U. Landman (1995)
Nanotribology: friction, wear and lubrication at the atomic scaleNature, 374
-
C. Kim, John Kim, B. Sridharan (1998)
Comparative evaluation of drying techniques for surface micromachiningSensors and Actuators A-physical, 64
-
M. Boer, D. Luck, J. Walraven, J. Redmond (2001)
Characterization of an inchworm actuator fabricated by polysilicon surface micromachining, 4558
-
K. Komvopoulos, W. Yan (1998)
Three-Dimensional Elastic-Plastic Fractal Analysis of Surface Adhesion in Microelectromechanical SystemsJournal of Tribology-transactions of The Asme, 120
-
P. Man, B. Gogoi, C. Mastrangelo (1997)
Elimination of post-release adhesion in microstructures using conformal fluorocarbon coatingsIEEE\/ASME Journal of Microelectromechanical Systems, 6
-
R. Howe (1988)
Surface micromachining for microsensors and microactuatorsJournal of Vacuum Science & Technology B, 6
-
L. Magagnin, R. Maboudian, C. Carraro (2001)
Selective Deposition of Thin Copper Films onto Silicon with Improved AdhesionElectrochemical and Solid State Letters, 4
-
M. Boer, T. Michalske (1999)
Accurate method for determining adhesion of cantilever beamsJournal of Applied Physics, 86
-
Hyuk-Jeen Suh, P. Bharathi, D. Beebe, J. Moore (2000)
Dendritic material as a dry-release sacrificial layerJournal of Microelectromechanical Systems, 9
-
Jong Lee, W. Jang, C. Lee, Yong Lee, C. Choi, J. Baek, H. Yoo (1998)
Characterization of anhydrous HF gas-phase etching with CH3OH for sacrificial oxide removalSensors and Actuators A-physical, 64
-
Yongseok Jun, Xiaoyang Zhu (2003)
Alkoxyl monolayers as anti-stiction coatings in Si-based MEMS devicesJournal of Adhesion Science and Technology, 17
-
D. Maugis (1992)
Adhesion of spheres : the JKR-DMT transition using a dugdale model, 150
-
A. Majumdar, B. Bhushan (1991)
Fractal Model of Elastic-Plastic Contact Between Rough SurfacesJournal of Tribology-transactions of The Asme, 113
-
B. Jensen, F. Bitsie, M. Boer (1999)
Interferometric measurement for improved understanding of boundary effects in micromachined beams, 3875
-
M. Madou (2002)
Fundamentals of Microfabrication -
M. Saif, N. MacDonald (1998)
Microinstruments for submicron material studiesJournal of Materials Research, 13
-
R. Alley, G. Cuan, Roger Howe, K. Komvopoulos (1992)
The effect of release-etch processing on surface microstructure stictionTechnical Digest IEEE Solid-State Sensor and Actuator Workshop
-
C. Cabuz, E. Cabuz, T. Ohnstein, J. Neus, R. Maboudian (2000)
Factors enhancing the reliability of touch-mode electrostatic actuatorsSensors and Actuators A-physical, 79
-
K. Petersen (1982)
Silicon as a mechanical materialProceedings of the IEEE, 70
-
Lesile Glasser (1980)
The chemistry of silica: By Ralph K. Iller. Pp. vii+ 866. Wiley, Chichester. 1979, £39.50Endeavour, 4
-
P. Clechet, C. Martelet, M. Belin, H. Zarrad, N. Jaffrezic‐Renault, S. Fayeulle (1994)
Lubrication of silicon micromechanisms by chemical grafting of long-chain moleculesSensors and Actuators A-physical, 44
-
W. Ashurst, M. Boer, C. Carraro, R. Maboudian (2003)
An investigation of sidewall adhesion in MEMSApplied Surface Science, 212
-
H. Guckel, J. Sniegowski, T. Christenson, F. Raissi (1990)
The application of fine-grained, tensile polysilicon to mechanicaly resonant transducersSensors and Actuators A-physical, 21
-
K. Johnson, K. Kendall, A. Roberts (1971)
Surface energy and the contact of elastic solidsProceedings of the Royal Society of London. A. Mathematical and Physical Sciences, 324
-
B. Bhushan (1998)
Tribology Issues and Opportunities in MEMS -
C. Mastrangelo (1997)
Adhesion-related failure mechanisms in micromechanical devicesTribology Letters, 3
-
Z. Rymuza (1999)
Control tribological and mechanical properties of MEMS surfaces. Part 1: critical reviewMicrosystem Technologies, 5
-
C. Mate, G. McClelland, R. Erlandsson, S. Chiang (1987)
Atomic-scale friction of a tungsten tip on a graphite surface.Physical review letters, 59 17
-
J. Greenwood, J. Williamson (1966)
Contact of nominally flat surfacesProceedings of the Royal Society of London. Series A. Mathematical and Physical Sciences, 295
-
D. Dowson (1979)
History of Tribology -
R. Maboudian, R. Howe (1997)
Stiction reduction processes for surfacemicromachinesTribology Letters, 3
-
M. Houston, R. Howe, R. Maboudian (1997)
Effect of hydrogen termination on the work of adhesion between rough polycrystalline silicon surfacesJournal of Applied Physics, 81
-
Bonghwan Kim, T. Chung, C. Oh, K. Chun (2001)
A new organic modifier for anti-stictionIEEE\/ASME Journal of Microelectromechanical Systems, 10
-
S. Henck (1997)
Lubrication of digital micromirrordevicesTMTribology Letters, 3
-
N. Tas, C. Gui, M. Elwenspoek (2003)
Static friction in elastic adhesion contacts in MEMSJournal of Adhesion Science and Technology, 17
-
J. Israelachvili (1985)
Intermolecular and surface forces -
R. Alley, K. Komvopoulos, R. Howe (1994)
Self‐assembled monolayer film for enhanced imaging of rough surfaces with atomic force microscopyJournal of Applied Physics, 76
-
B. Derjaguin, V. Muller, Y. Toporov (1975)
Effect of contact deformations on the adhesion of particlesJournal of Colloid and Interface Science, 53
-
M. Mehregany, C. Zorman (2001)
Surface Micromachining: A Brief IntroductionMRS Bulletin, 26
-
J. Sniegowski, M. Boer (2000)
IC-Compatible Polysilicon Surface MicromachiningAnnual Review of Materials Science, 30
-
R. Feynman (1999)
There’s plenty of room at the bottomResonance, 16
-
N. Tas, T. Sonnenberg, H. Jansen, R. Legtenberg, M. Elwenspoek (1996)
Stiction in surface micromachiningJournal of Micromechanics and Microengineering, 6
-
L. Magagnin, R. Maboudian, C. Carraro (2002)
Gold Deposition by Galvanic Displacement on Semiconductor Surfaces: Effect of Substrate on AdhesionJournal of Physical Chemistry B, 106
-
T. Mayer, J. Elam, S. George, P. Kotula, R. Goeke (2003)
Atomic-layer deposition of wear-resistant coatings for microelectromechanical devicesApplied Physics Letters, 82
-
T. Mayer, M. Boer, N. Shinn, P. Clews, T. Michalske (2000)
Chemical vapor deposition of fluoroalkylsilane monolayer films for adhesion control in microelectromechanical systemsJournal of Vacuum Science & Technology B, 18
-
D. Kobayashi, Chang-Jin Kim, Hiroyuki Fujita (1993)
Photoresist-Assisted Release of Movable MicrostructuresJapanese Journal of Applied Physics, 32
-
R. Maboudian, W. Ashurst, C. Carraro (2013)
Tribological Challenges in Micromechanical SystemsTribology Letters, 12
-
R. Maboudian (1998)
Surface processes in MEMS technologySurface Science Reports, 30
-
Ya-pu Zhao, Lisen Wang, Tongxi Yu (2003)
Mechanics of adhesion in MEMS—a reviewJournal of Adhesion Science and Technology, 17
-
K. Fuller, D. Tabor (1975)
The effect of surface roughness on the adhesion of elastic solidsProceedings of the Royal Society of London. A. Mathematical and Physical Sciences, 345
-
K. Komvopoulos (2003)
Adhesion and friction forces in microelectromechanical systems: mechanisms, measurement, surface modification techniques, and adhesion theoryJournal of Adhesion Science and Technology, 17
-
R. Maboudian (1998)
Adhesion and Friction Issues Associated With Reliable Operation of MEMSMRS Bulletin, 23
-
C. Carraro, L. Magagnin, R. Maboudian (2002)
Selective metallization of silicon micromechanical devicesElectrochimica Acta, 47
-
C. Stoldt, M. Fritz, C. Carraro, R. Maboudian (2001)
Micromechanical properties of silicon-carbide thin films deposited using single-source chemical-vapor depositionApplied Physics Letters, 79
-
K. Kendall (1994)
Adhesion: Molecules and MechanicsScience, 263
- Publisher
- Annual Reviews
- Copyright
- Copyright © 2004 by Annual Reviews. All rights reserved
- ISSN
- 0066-426X
- eISSN
- 1545-1593
- DOI
- 10.1146/annurev.physchem.55.091602.094445
- pmid
- 15117246
- Publisher site
- See Article on Publisher Site
Abstract
▪ Abstract The microscopic length scale and high surface-to-volume ratio, characteristic of microelectro-mechanical systems (MEMS), dictate that surface properties are of paramount importance. This review deals with the effects of surface chemical treatments on tribological properties (adhesion, friction, and wear) of MEMS devices. After a brief review of materials and processes that are utilized in MEMS technology, the relevant tribological and chemical issues are discussed. Various MEMS microinstruments are discussed, which are commonly employed to perform adhesion, friction, and wear measurements. The effects of different surface treatments on the reported tribological properties are discussed.
Journal
Annual Review of Physical Chemistry – Annual Reviews
Published: Jun 1, 2004