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The effect of Pd addition to the Al alloy on the photoelectrochemical response is described. The oxide films are characterized by photoelectrochemical methods. The addition of Pd decreases ...
Dispersions of nanoscale Pb particles embedded in Si , Al , and Cu matrices have been synthesized by ion implantation and subsequent annealing. The melting transitions of the embedded Pb nanocrystals ...
Abstract This paper reported the effect of the weak damage in the Al0.25Ga0.75As/GaAs epitaxial layer induced by 0.8 MeV Si ions implantation with ion dose from 1 × 1014 to 5 × 1015 cm-2. The Raman ...
of the film , which was used as a mask to prevent the Si (100) surface from ion ‐ implantation induced damages. The effects of ion species, ion energy, ion dosage, and annealing temperature on the selective ...
, while Fourier transforms infrared spectroscopy (FTIR) was performed to track the changes in the optical characteristics of thin films before and after the ions ’ irradiation and implantation ...
implanter and a cathodic arc plasma system, respectively. The films were implanted with Si , Ti, Hf, W, and Al of ion doses approximately equal to 1 and 3 × 1016 ions /cm2 and mean ion kinetic energies ...
, released from the A12O3 by the Si implantation , and present in the recrystallized films at a concentration of ≃2×l016 Al /cm3 . After a 75 min steam oxidation at 875 °C, which consumes 0.06 Μm of Si ...
in the film , but to dielectric breakdown of the film during ion implantation . This can be completely avoided by coating the mask with thin conductive films such as aluminum or polycrystalline Si just before ...
. Samples were implanted at room temperature either with Ne or Al ions to form a concentration–depth plateau reaching a concentration of ≈ 1.0 at.% (Ne), or ≈ 0.008 at.% ( Al ). Ne and Al implantations were ...
of amorphous silicon film chemically deposited using a gas mixture of Si2H6–PH3; the other was made of poly- Si film deposited by SiH4 decomposition and doped by As+ ion implantation . The ONO thin dielectric ...
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